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- W2069221388 abstract "Effects of H+ implantation (⩽5×1016cm−2) on stress relaxation in an oxidation-induced Ge condensation method have been investigated to form stress-relaxed ultrathin (∼30nm) SiGe-on-insulator (SGOI) virtual substrates. High-dose (⩾1015cm−2) implantation enhanced stress relaxation, which was attributed to bond breaking at the SiGe∕buriedSiO2 interface. However, oxidation velocity was also enhanced due to irradiation defects. Two-step annealing (500 °C for 30 min and 850 °C for 60 min) before oxidation was proposed to remove irradiation defects. This achieved enhanced stress relaxation in ultrathin SGOI without changing oxidation velocity." @default.
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- W2069221388 date "2005-05-16" @default.
- W2069221388 modified "2023-10-18" @default.
- W2069221388 title "Enhanced stress relaxation in ultrathin SiGe-on-insulator by H+-implantation-assisted oxidation" @default.
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- W2069221388 doi "https://doi.org/10.1063/1.1935028" @default.
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