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- W2069303732 abstract "Electrical on-wafer characterization in FBAR is automated by means of a wide-band parameter extraction algorithm, in order to define a complete characterization vehicle for FBAR and MEMS resonators. A model of FBAR-substrate losses is proposed and an automation algorithm implementing a multi-step least-squares strategy is presented. Extraction of the equivalent-circuit parameters is performed from experimental s-parameter data acquired by a microwave network analyzer. The results of FBAR and substrate characterization are presented, and the basis of an integrated test vehicle is discussed." @default.
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- W2069303732 date "2007-03-01" @default.
- W2069303732 modified "2023-10-18" @default.
- W2069303732 title "Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)" @default.
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- W2069303732 doi "https://doi.org/10.1109/icmts.2007.374474" @default.
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