Matches in SemOpenAlex for { <https://semopenalex.org/work/W2069376970> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2069376970 abstract "A whole Benzocyclobutene (BCB) membrane zero-level packaging using a wafer level bonding technique is presented. Wafer-scale membrane transfer technique using silicon carrier wafers was used to make BCB membrane caps placed above the device wafers. BCB multiple coating process using CYCLOTENE 4026-46 was developed for an encapsulation cap. The average height of the implemented BCB cap was approximately 40 μm with a little curvature for the dimension of 2mm x 3mm. Hermeticity of BCB was improved by depositing 0.5 μm-thick PECVD nitride on the membrane, which was verified by vacuum chamber test and the ANSYS model was developed to describe the BCB membrane movement depending on the vacuum level. Mechanical resonant frequency of the BCB membrane was also characterized 7.5kHz with an optical measurement. In addition, RF characterization using coplanar waveguide (CPW) line and thin-film resonator were performed to estimate the effect of BCB film package from DC to 110GHz. The packaged thin-film resonator showed a frequency change of 100MHz at 62.5GHz resonance frequency and 200MHz at 104GHz." @default.
- W2069376970 created "2016-06-24" @default.
- W2069376970 creator A5027001216 @default.
- W2069376970 creator A5060121715 @default.
- W2069376970 creator A5082935866 @default.
- W2069376970 date "2007-05-01" @default.
- W2069376970 modified "2023-10-04" @default.
- W2069376970 title "Mechanical and Electrical Characterization of Benzocyclobutene Membrane Packaging" @default.
- W2069376970 cites W1963772310 @default.
- W2069376970 cites W1979960932 @default.
- W2069376970 cites W2045613690 @default.
- W2069376970 cites W2080648734 @default.
- W2069376970 cites W2083784951 @default.
- W2069376970 cites W2096500209 @default.
- W2069376970 cites W2098912543 @default.
- W2069376970 cites W2116135098 @default.
- W2069376970 cites W2120907253 @default.
- W2069376970 cites W2132127049 @default.
- W2069376970 cites W2224458138 @default.
- W2069376970 cites W2535168940 @default.
- W2069376970 doi "https://doi.org/10.1109/ectc.2007.374021" @default.
- W2069376970 hasPublicationYear "2007" @default.
- W2069376970 type Work @default.
- W2069376970 sameAs 2069376970 @default.
- W2069376970 citedByCount "12" @default.
- W2069376970 countsByYear W20693769702012 @default.
- W2069376970 countsByYear W20693769702014 @default.
- W2069376970 countsByYear W20693769702015 @default.
- W2069376970 countsByYear W20693769702016 @default.
- W2069376970 crossrefType "proceedings-article" @default.
- W2069376970 hasAuthorship W2069376970A5027001216 @default.
- W2069376970 hasAuthorship W2069376970A5060121715 @default.
- W2069376970 hasAuthorship W2069376970A5082935866 @default.
- W2069376970 hasConcept C121332964 @default.
- W2069376970 hasConcept C133386390 @default.
- W2069376970 hasConcept C159985019 @default.
- W2069376970 hasConcept C160671074 @default.
- W2069376970 hasConcept C165013422 @default.
- W2069376970 hasConcept C192562407 @default.
- W2069376970 hasConcept C2776366733 @default.
- W2069376970 hasConcept C2777431650 @default.
- W2069376970 hasConcept C3736036 @default.
- W2069376970 hasConcept C41625074 @default.
- W2069376970 hasConcept C44838205 @default.
- W2069376970 hasConcept C49040817 @default.
- W2069376970 hasConcept C54355233 @default.
- W2069376970 hasConcept C544956773 @default.
- W2069376970 hasConcept C62520636 @default.
- W2069376970 hasConcept C86803240 @default.
- W2069376970 hasConcept C97126364 @default.
- W2069376970 hasConceptScore W2069376970C121332964 @default.
- W2069376970 hasConceptScore W2069376970C133386390 @default.
- W2069376970 hasConceptScore W2069376970C159985019 @default.
- W2069376970 hasConceptScore W2069376970C160671074 @default.
- W2069376970 hasConceptScore W2069376970C165013422 @default.
- W2069376970 hasConceptScore W2069376970C192562407 @default.
- W2069376970 hasConceptScore W2069376970C2776366733 @default.
- W2069376970 hasConceptScore W2069376970C2777431650 @default.
- W2069376970 hasConceptScore W2069376970C3736036 @default.
- W2069376970 hasConceptScore W2069376970C41625074 @default.
- W2069376970 hasConceptScore W2069376970C44838205 @default.
- W2069376970 hasConceptScore W2069376970C49040817 @default.
- W2069376970 hasConceptScore W2069376970C54355233 @default.
- W2069376970 hasConceptScore W2069376970C544956773 @default.
- W2069376970 hasConceptScore W2069376970C62520636 @default.
- W2069376970 hasConceptScore W2069376970C86803240 @default.
- W2069376970 hasConceptScore W2069376970C97126364 @default.
- W2069376970 hasLocation W20693769701 @default.
- W2069376970 hasLocation W20693769702 @default.
- W2069376970 hasLocation W20693769703 @default.
- W2069376970 hasOpenAccess W2069376970 @default.
- W2069376970 hasPrimaryLocation W20693769701 @default.
- W2069376970 hasRelatedWork W1581940243 @default.
- W2069376970 hasRelatedWork W1979960932 @default.
- W2069376970 hasRelatedWork W2021170278 @default.
- W2069376970 hasRelatedWork W2045613690 @default.
- W2069376970 hasRelatedWork W2049729344 @default.
- W2069376970 hasRelatedWork W2092206813 @default.
- W2069376970 hasRelatedWork W2157995048 @default.
- W2069376970 hasRelatedWork W2544228638 @default.
- W2069376970 hasRelatedWork W4250688100 @default.
- W2069376970 hasRelatedWork W2183126007 @default.
- W2069376970 isParatext "false" @default.
- W2069376970 isRetracted "false" @default.
- W2069376970 magId "2069376970" @default.
- W2069376970 workType "article" @default.