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- W2069471288 abstract "The Stepwise Oxidation Profiling technique is applied to boron doped single crystalline silicon. The procedure works by altering between electrical sheet resistance measurements and Si consumption by electrochemical anodic oxidation. The fabrication of planar van‐der‐Pauw structures was introduced. It was shown that the SWOP profiles are matching well with SIMS reference measurements, and a depth resolution of ≤1 nm and a detection limit of 1×1016 cm−3 was achieved." @default.
- W2069471288 created "2016-06-24" @default.
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- W2069471288 date "2011-01-01" @default.
- W2069471288 modified "2023-09-23" @default.
- W2069471288 title "SWOP—Charge Carrier Depth Profiling of Boron Doped Single Crystalline Silicon" @default.
- W2069471288 cites W1555969351 @default.
- W2069471288 doi "https://doi.org/10.1063/1.3548353" @default.
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