FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2069541330> ?p ?o ?g. }

• W2069541330 endingPage "C123" @default.
• W2069541330 startingPage "C123" @default.
• W2069541330 abstract "(Ti,Zr)N films were prepared by dc reactive magnetron sputtering from a Ti-5 atom % Zr alloy target in gas mixtures and then employed as diffusion barriers between Cu thin films and Si substrates. Material characteristics of the (Ti,Zr)N film were investigated by X-ray photoelectron spectroscopy and cross-sectional transmission electron microscopy (XTEM). The (Ti,Zr)N film microstructure was an assembly of very small columnar crystallites with a rock-salt (NaCl) structure. Metallurgical reactions of and were studied by X-ray diffraction and sheet resistance measurements. The variation percentage of sheet resistance for all Cu/barrier/Si systems stayed at a constant value after annealing up to 500°C for 30 min. However, the sheet resistance increased dramatically after annealing above 750°C for and 500°C for both and For these samples, the interface deteriorated seriously and formation of was observed by XTEM. Our results suggest that the refractory binary metal nitride film, (Ti,Zr)N, can be used as a diffusion barrier for Cu metallization as compared to the well-known TaN film. © 2003 The Electrochemical Society. All rights reserved." @default.
• W2069541330 created "2016-06-24" @default.
• W2069541330 creator A5002033532 @default.
• W2069541330 creator A5011788500 @default.
• W2069541330 creator A5024316494 @default.
• W2069541330 creator A5035573065 @default.
• W2069541330 creator A5040557381 @default.
• W2069541330 creator A5058888691 @default.
• W2069541330 creator A5060825980 @default.
• W2069541330 creator A5060889655 @default.
• W2069541330 creator A5070828989 @default.
• W2069541330 creator A5080930491 @default.
• W2069541330 creator A5090536127 @default.
• W2069541330 date "2003-01-01" @default.
• W2069541330 modified "2023-09-26" @default.
• W2069541330 title "Characteristics of DC Reactively Sputtered (Ti,Zr)N Thin Films as Diffusion Barriers for Cu Metallization" @default.
• W2069541330 cites W1964958598 @default.
• W2069541330 cites W1966782256 @default.
• W2069541330 cites W1972897153 @default.
• W2069541330 cites W1999404443 @default.
• W2069541330 cites W2045333154 @default.
• W2069541330 cites W2068386399 @default.
• W2069541330 cites W2143187294 @default.
• W2069541330 doi "https://doi.org/10.1149/1.1592913" @default.
• W2069541330 hasPublicationYear "2003" @default.
• W2069541330 type Work @default.
• W2069541330 sameAs 2069541330 @default.
• W2069541330 citedByCount "8" @default.
• W2069541330 countsByYear W20695413302014 @default.
• W2069541330 countsByYear W20695413302017 @default.
• W2069541330 countsByYear W20695413302018 @default.
• W2069541330 crossrefType "journal-article" @default.
• W2069541330 hasAuthorship W2069541330A5002033532 @default.
• W2069541330 hasAuthorship W2069541330A5011788500 @default.
• W2069541330 hasAuthorship W2069541330A5024316494 @default.
• W2069541330 hasAuthorship W2069541330A5035573065 @default.
• W2069541330 hasAuthorship W2069541330A5040557381 @default.
• W2069541330 hasAuthorship W2069541330A5058888691 @default.
• W2069541330 hasAuthorship W2069541330A5060825980 @default.
• W2069541330 hasAuthorship W2069541330A5060889655 @default.
• W2069541330 hasAuthorship W2069541330A5070828989 @default.
• W2069541330 hasAuthorship W2069541330A5080930491 @default.
• W2069541330 hasAuthorship W2069541330A5090536127 @default.
• W2069541330 hasConcept C113196181 @default.
• W2069541330 hasConcept C127413603 @default.
• W2069541330 hasConcept C137637335 @default.
• W2069541330 hasConcept C146088050 @default.
• W2069541330 hasConcept C159985019 @default.
• W2069541330 hasConcept C171250308 @default.
• W2069541330 hasConcept C175708663 @default.
• W2069541330 hasConcept C185592680 @default.
• W2069541330 hasConcept C19067145 @default.
• W2069541330 hasConcept C191897082 @default.
• W2069541330 hasConcept C192562407 @default.
• W2069541330 hasConcept C194760766 @default.
• W2069541330 hasConcept C22423302 @default.
• W2069541330 hasConcept C2777855556 @default.
• W2069541330 hasConcept C2778836790 @default.
• W2069541330 hasConcept C2779227376 @default.
• W2069541330 hasConcept C2780026712 @default.
• W2069541330 hasConcept C42360764 @default.
• W2069541330 hasConcept C43617362 @default.
• W2069541330 hasConcept C66825105 @default.
• W2069541330 hasConcept C87976508 @default.
• W2069541330 hasConceptScore W2069541330C113196181 @default.
• W2069541330 hasConceptScore W2069541330C127413603 @default.
• W2069541330 hasConceptScore W2069541330C137637335 @default.
• W2069541330 hasConceptScore W2069541330C146088050 @default.
• W2069541330 hasConceptScore W2069541330C159985019 @default.
• W2069541330 hasConceptScore W2069541330C171250308 @default.
• W2069541330 hasConceptScore W2069541330C175708663 @default.
• W2069541330 hasConceptScore W2069541330C185592680 @default.
• W2069541330 hasConceptScore W2069541330C19067145 @default.
• W2069541330 hasConceptScore W2069541330C191897082 @default.
• W2069541330 hasConceptScore W2069541330C192562407 @default.
• W2069541330 hasConceptScore W2069541330C194760766 @default.
• W2069541330 hasConceptScore W2069541330C22423302 @default.
• W2069541330 hasConceptScore W2069541330C2777855556 @default.
• W2069541330 hasConceptScore W2069541330C2778836790 @default.
• W2069541330 hasConceptScore W2069541330C2779227376 @default.
• W2069541330 hasConceptScore W2069541330C2780026712 @default.
• W2069541330 hasConceptScore W2069541330C42360764 @default.
• W2069541330 hasConceptScore W2069541330C43617362 @default.
• W2069541330 hasConceptScore W2069541330C66825105 @default.
• W2069541330 hasConceptScore W2069541330C87976508 @default.
• W2069541330 hasIssue "9" @default.
• W2069541330 hasLocation W20695413301 @default.
• W2069541330 hasOpenAccess W2069541330 @default.
• W2069541330 hasPrimaryLocation W20695413301 @default.
• W2069541330 hasRelatedWork W2010733322 @default.
• W2069541330 hasRelatedWork W2015560634 @default.
• W2069541330 hasRelatedWork W2089251307 @default.
• W2069541330 hasRelatedWork W2090876776 @default.
• W2069541330 hasRelatedWork W2113433997 @default.
• W2069541330 hasRelatedWork W2124166613 @default.
• W2069541330 hasRelatedWork W213848383 @default.
• W2069541330 hasRelatedWork W2366815809 @default.
• W2069541330 hasRelatedWork W2516495798 @default.

• next