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- W2069572023 abstract "Abstract A 3 grid commercial ion gun was operated at efficient microtech condition but without a neutralizer, and the substrate was allowed to float to high voltages. The space charge effects of the ion beam, which was blocked by the substrate, were traced also by a movable floating probe. The substrate voltage and the deposition energy could be partly controlled by affecting the secondary electron generation at the decelerating grid of the ion gun. The technique was used to deposit diamond-like carbon (DLC) films at energies below 30 eV, which were harder than usual." @default.
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- W2069572023 date "1986-06-01" @default.
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- W2069572023 title "Dynamic interaction of floating substrates with an ion beam from a three grid microtech system operated without neutralizer" @default.
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- W2069572023 doi "https://doi.org/10.1016/0042-207x(86)90011-4" @default.
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