Matches in SemOpenAlex for { <https://semopenalex.org/work/W2069579733> ?p ?o ?g. }
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- W2069579733 endingPage "81" @default.
- W2069579733 startingPage "78" @default.
- W2069579733 abstract "A capless annealing method for GaAs, employing short (1-10-s) thermal heat pulses from a graphite strip heater, is described. Results with <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>29</sup> Si+ implanted into semi-insulating chromium-doped HB and chromium-doped LEC GaAs are presented. The samples were annealed at temperatures as high as 1000°C in a stationary N <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> atmosphere with the implanted surface in close contact with a flat graphite strip heater surface. The wafers were covered with a graphite lid, effectively confining the volatile arsenic to a very small volume around the sample and providing a uniform temperature environment. Implantation efficiencies were high, and the quality of the implanted surface remained excellent after annealing." @default.
- W2069579733 created "2016-06-24" @default.
- W2069579733 creator A5020707742 @default.
- W2069579733 date "1984-03-01" @default.
- W2069579733 modified "2023-09-23" @default.
- W2069579733 title "Pill-box capless thermal-heat-pulse annealing of ion-implanted GaAs" @default.
- W2069579733 cites W118625518 @default.
- W2069579733 cites W140374981 @default.
- W2069579733 cites W14533006 @default.
- W2069579733 cites W1554944099 @default.
- W2069579733 cites W1967467249 @default.
- W2069579733 cites W1967629464 @default.
- W2069579733 cites W1970520746 @default.
- W2069579733 cites W1983565473 @default.
- W2069579733 cites W1996880777 @default.
- W2069579733 cites W2008818254 @default.
- W2069579733 cites W2013192037 @default.
- W2069579733 cites W2027763270 @default.
- W2069579733 cites W2033845407 @default.
- W2069579733 cites W2038413287 @default.
- W2069579733 cites W2065035450 @default.
- W2069579733 cites W2070491197 @default.
- W2069579733 cites W2076600560 @default.
- W2069579733 cites W2079055824 @default.
- W2069579733 cites W2082516129 @default.
- W2069579733 cites W2129090386 @default.
- W2069579733 cites W2323266912 @default.
- W2069579733 cites W3203248124 @default.
- W2069579733 doi "https://doi.org/10.1109/edl.1984.25838" @default.
- W2069579733 hasPublicationYear "1984" @default.
- W2069579733 type Work @default.
- W2069579733 sameAs 2069579733 @default.
- W2069579733 citedByCount "16" @default.
- W2069579733 crossrefType "journal-article" @default.
- W2069579733 hasAuthorship W2069579733A5020707742 @default.
- W2069579733 hasConcept C113196181 @default.
- W2069579733 hasConcept C145148216 @default.
- W2069579733 hasConcept C159985019 @default.
- W2069579733 hasConcept C160671074 @default.
- W2069579733 hasConcept C178790620 @default.
- W2069579733 hasConcept C185592680 @default.
- W2069579733 hasConcept C191897082 @default.
- W2069579733 hasConcept C192562407 @default.
- W2069579733 hasConcept C2777855556 @default.
- W2069579733 hasConcept C2779698641 @default.
- W2069579733 hasConcept C41823505 @default.
- W2069579733 hasConcept C43617362 @default.
- W2069579733 hasConcept C49040817 @default.
- W2069579733 hasConcept C511782168 @default.
- W2069579733 hasConcept C57863236 @default.
- W2069579733 hasConceptScore W2069579733C113196181 @default.
- W2069579733 hasConceptScore W2069579733C145148216 @default.
- W2069579733 hasConceptScore W2069579733C159985019 @default.
- W2069579733 hasConceptScore W2069579733C160671074 @default.
- W2069579733 hasConceptScore W2069579733C178790620 @default.
- W2069579733 hasConceptScore W2069579733C185592680 @default.
- W2069579733 hasConceptScore W2069579733C191897082 @default.
- W2069579733 hasConceptScore W2069579733C192562407 @default.
- W2069579733 hasConceptScore W2069579733C2777855556 @default.
- W2069579733 hasConceptScore W2069579733C2779698641 @default.
- W2069579733 hasConceptScore W2069579733C41823505 @default.
- W2069579733 hasConceptScore W2069579733C43617362 @default.
- W2069579733 hasConceptScore W2069579733C49040817 @default.
- W2069579733 hasConceptScore W2069579733C511782168 @default.
- W2069579733 hasConceptScore W2069579733C57863236 @default.
- W2069579733 hasIssue "3" @default.
- W2069579733 hasLocation W20695797331 @default.
- W2069579733 hasOpenAccess W2069579733 @default.
- W2069579733 hasPrimaryLocation W20695797331 @default.
- W2069579733 hasRelatedWork W1616992653 @default.
- W2069579733 hasRelatedWork W1980684490 @default.
- W2069579733 hasRelatedWork W1983342941 @default.
- W2069579733 hasRelatedWork W2046634487 @default.
- W2069579733 hasRelatedWork W2074003831 @default.
- W2069579733 hasRelatedWork W2076963372 @default.
- W2069579733 hasRelatedWork W2093258414 @default.
- W2069579733 hasRelatedWork W2742213859 @default.
- W2069579733 hasRelatedWork W4226394771 @default.
- W2069579733 hasRelatedWork W1963762072 @default.
- W2069579733 hasVolume "5" @default.
- W2069579733 isParatext "false" @default.
- W2069579733 isRetracted "false" @default.
- W2069579733 magId "2069579733" @default.
- W2069579733 workType "article" @default.