Matches in SemOpenAlex for { <https://semopenalex.org/work/W2069651801> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W2069651801 abstract "We describe electrostatically actuated silicon nanotweezers which are intended for the manipulation and characterization of DNA molecules. The fabrication process combines KOH etching and deep reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafer to form sharp nanotips and high aspect ratio microstructures, respectively. The microelectromechanical system (MEMS) consists of a pair of opposing tips, the distance of which can be accurately adjusted thanks to a high resolution differential capacitive sensor. The device shows a resolution of 5 nm for a displacement range of 3 μm (static mode). It has a resonant frequency at 2 kHz and a quality factor of 40 in air, and 550 in vacuum." @default.
- W2069651801 created "2016-06-24" @default.
- W2069651801 creator A5006183326 @default.
- W2069651801 creator A5037980867 @default.
- W2069651801 creator A5047686660 @default.
- W2069651801 creator A5048736602 @default.
- W2069651801 creator A5051405047 @default.
- W2069651801 creator A5061605675 @default.
- W2069651801 creator A5061778012 @default.
- W2069651801 creator A5073676276 @default.
- W2069651801 creator A5074599992 @default.
- W2069651801 date "2006-05-01" @default.
- W2069651801 modified "2023-09-30" @default.
- W2069651801 title "Silicon Nanotweezers with Adjustable and Controllable Gap for the Manipulation and Characterization of DNA Molecules" @default.
- W2069651801 cites W2001907809 @default.
- W2069651801 cites W2009439307 @default.
- W2069651801 cites W2013632624 @default.
- W2069651801 cites W2013726581 @default.
- W2069651801 cites W2017075566 @default.
- W2069651801 cites W2023362441 @default.
- W2069651801 cites W2024316435 @default.
- W2069651801 cites W2081407528 @default.
- W2069651801 cites W2092911180 @default.
- W2069651801 cites W2137774806 @default.
- W2069651801 cites W2160480921 @default.
- W2069651801 cites W2162057156 @default.
- W2069651801 doi "https://doi.org/10.1109/mmb.2006.251507" @default.
- W2069651801 hasPublicationYear "2006" @default.
- W2069651801 type Work @default.
- W2069651801 sameAs 2069651801 @default.
- W2069651801 citedByCount "11" @default.
- W2069651801 countsByYear W20696518012014 @default.
- W2069651801 countsByYear W20696518012015 @default.
- W2069651801 countsByYear W20696518012017 @default.
- W2069651801 crossrefType "proceedings-article" @default.
- W2069651801 hasAuthorship W2069651801A5006183326 @default.
- W2069651801 hasAuthorship W2069651801A5037980867 @default.
- W2069651801 hasAuthorship W2069651801A5047686660 @default.
- W2069651801 hasAuthorship W2069651801A5048736602 @default.
- W2069651801 hasAuthorship W2069651801A5051405047 @default.
- W2069651801 hasAuthorship W2069651801A5061605675 @default.
- W2069651801 hasAuthorship W2069651801A5061778012 @default.
- W2069651801 hasAuthorship W2069651801A5073676276 @default.
- W2069651801 hasAuthorship W2069651801A5074599992 @default.
- W2069651801 hasConcept C100460472 @default.
- W2069651801 hasConcept C119599485 @default.
- W2069651801 hasConcept C124634506 @default.
- W2069651801 hasConcept C127413603 @default.
- W2069651801 hasConcept C130472188 @default.
- W2069651801 hasConcept C136525101 @default.
- W2069651801 hasConcept C142724271 @default.
- W2069651801 hasConcept C160671074 @default.
- W2069651801 hasConcept C171250308 @default.
- W2069651801 hasConcept C192562407 @default.
- W2069651801 hasConcept C204787440 @default.
- W2069651801 hasConcept C206755178 @default.
- W2069651801 hasConcept C2779227376 @default.
- W2069651801 hasConcept C2780841128 @default.
- W2069651801 hasConcept C37977207 @default.
- W2069651801 hasConcept C49040817 @default.
- W2069651801 hasConcept C53143962 @default.
- W2069651801 hasConcept C544956773 @default.
- W2069651801 hasConcept C71924100 @default.
- W2069651801 hasConceptScore W2069651801C100460472 @default.
- W2069651801 hasConceptScore W2069651801C119599485 @default.
- W2069651801 hasConceptScore W2069651801C124634506 @default.
- W2069651801 hasConceptScore W2069651801C127413603 @default.
- W2069651801 hasConceptScore W2069651801C130472188 @default.
- W2069651801 hasConceptScore W2069651801C136525101 @default.
- W2069651801 hasConceptScore W2069651801C142724271 @default.
- W2069651801 hasConceptScore W2069651801C160671074 @default.
- W2069651801 hasConceptScore W2069651801C171250308 @default.
- W2069651801 hasConceptScore W2069651801C192562407 @default.
- W2069651801 hasConceptScore W2069651801C204787440 @default.
- W2069651801 hasConceptScore W2069651801C206755178 @default.
- W2069651801 hasConceptScore W2069651801C2779227376 @default.
- W2069651801 hasConceptScore W2069651801C2780841128 @default.
- W2069651801 hasConceptScore W2069651801C37977207 @default.
- W2069651801 hasConceptScore W2069651801C49040817 @default.
- W2069651801 hasConceptScore W2069651801C53143962 @default.
- W2069651801 hasConceptScore W2069651801C544956773 @default.
- W2069651801 hasConceptScore W2069651801C71924100 @default.
- W2069651801 hasLocation W20696518011 @default.
- W2069651801 hasOpenAccess W2069651801 @default.
- W2069651801 hasPrimaryLocation W20696518011 @default.
- W2069651801 hasRelatedWork W2018742057 @default.
- W2069651801 hasRelatedWork W2027983671 @default.
- W2069651801 hasRelatedWork W2060870204 @default.
- W2069651801 hasRelatedWork W2091036922 @default.
- W2069651801 hasRelatedWork W2158392742 @default.
- W2069651801 hasRelatedWork W2159636143 @default.
- W2069651801 hasRelatedWork W2160557247 @default.
- W2069651801 hasRelatedWork W2164353131 @default.
- W2069651801 hasRelatedWork W2354298856 @default.
- W2069651801 hasRelatedWork W2605526809 @default.
- W2069651801 isParatext "false" @default.
- W2069651801 isRetracted "false" @default.
- W2069651801 magId "2069651801" @default.
- W2069651801 workType "article" @default.