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- W2069658051 abstract "In this paper, the effect of supply of hydrogen radicals to the SiN film growing surface during radio-frequency plasma-enhanced chemical vapor deposition was investigated. Hydrogen radicals were generated by microwave plasma. The improvement of optical and electrical properties and C-V characteristics was observed. The influence on the residual stress was also measured." @default.
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- W2069658051 date "1993-03-01" @default.
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- W2069658051 title "Supply of hydrogen radicals generated by microwave plasma to the SiN film growing surface during RF plasma enhanced chemical vapor deposition" @default.
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- W2069658051 doi "https://doi.org/10.1016/0169-4332(93)90669-3" @default.
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