Matches in SemOpenAlex for { <https://semopenalex.org/work/W2069673747> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2069673747 abstract "Periodic error is the major problem that limits the accuracy of heterodyne interferometry. A traceable system for periodic error measurement is developed based on a nonlinearity free Fabry-Perot (F-P) interferometer. The displacement accuracy of the F-P interferometer is 0.49 pm at 80 ms averaging time, with the measurement results referenced to an optical frequency comb. Experimental comparison between the F-P interferometer and a commercial heterodyne interferometer is carried out and it shows that the first harmonic periodic error dominates in the commercial heterodyne interferometer with an error amplitude of 4.64 nm." @default.
- W2069673747 created "2016-06-24" @default.
- W2069673747 creator A5006163301 @default.
- W2069673747 creator A5053333567 @default.
- W2069673747 creator A5077079875 @default.
- W2069673747 creator A5078950850 @default.
- W2069673747 date "2014-08-01" @default.
- W2069673747 modified "2023-10-16" @default.
- W2069673747 title "Note: Periodic error measurement in heterodyne interferometers using a subpicometer accuracy Fabry-Perot interferometer" @default.
- W2069673747 cites W1977004163 @default.
- W2069673747 cites W1995054886 @default.
- W2069673747 cites W2011359424 @default.
- W2069673747 cites W2021139854 @default.
- W2069673747 cites W2056908124 @default.
- W2069673747 cites W2057911073 @default.
- W2069673747 cites W2059079260 @default.
- W2069673747 cites W2060265024 @default.
- W2069673747 cites W2061586657 @default.
- W2069673747 cites W2062981324 @default.
- W2069673747 cites W2069439625 @default.
- W2069673747 cites W2070527724 @default.
- W2069673747 cites W2071103558 @default.
- W2069673747 cites W2080408373 @default.
- W2069673747 cites W2087073588 @default.
- W2069673747 cites W2092315964 @default.
- W2069673747 cites W2095046613 @default.
- W2069673747 cites W4234010574 @default.
- W2069673747 doi "https://doi.org/10.1063/1.4891696" @default.
- W2069673747 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/25173327" @default.
- W2069673747 hasPublicationYear "2014" @default.
- W2069673747 type Work @default.
- W2069673747 sameAs 2069673747 @default.
- W2069673747 citedByCount "3" @default.
- W2069673747 countsByYear W20696737472015 @default.
- W2069673747 countsByYear W20696737472018 @default.
- W2069673747 countsByYear W20696737472019 @default.
- W2069673747 crossrefType "journal-article" @default.
- W2069673747 hasAuthorship W2069673747A5006163301 @default.
- W2069673747 hasAuthorship W2069673747A5053333567 @default.
- W2069673747 hasAuthorship W2069673747A5077079875 @default.
- W2069673747 hasAuthorship W2069673747A5078950850 @default.
- W2069673747 hasConcept C120665830 @default.
- W2069673747 hasConcept C121332964 @default.
- W2069673747 hasConcept C127934551 @default.
- W2069673747 hasConcept C166689943 @default.
- W2069673747 hasConcept C169268690 @default.
- W2069673747 hasConcept C180205008 @default.
- W2069673747 hasConcept C184454961 @default.
- W2069673747 hasConcept C184551789 @default.
- W2069673747 hasConcept C204003914 @default.
- W2069673747 hasConcept C23576306 @default.
- W2069673747 hasConcept C24890656 @default.
- W2069673747 hasConcept C2780497637 @default.
- W2069673747 hasConcept C520434653 @default.
- W2069673747 hasConceptScore W2069673747C120665830 @default.
- W2069673747 hasConceptScore W2069673747C121332964 @default.
- W2069673747 hasConceptScore W2069673747C127934551 @default.
- W2069673747 hasConceptScore W2069673747C166689943 @default.
- W2069673747 hasConceptScore W2069673747C169268690 @default.
- W2069673747 hasConceptScore W2069673747C180205008 @default.
- W2069673747 hasConceptScore W2069673747C184454961 @default.
- W2069673747 hasConceptScore W2069673747C184551789 @default.
- W2069673747 hasConceptScore W2069673747C204003914 @default.
- W2069673747 hasConceptScore W2069673747C23576306 @default.
- W2069673747 hasConceptScore W2069673747C24890656 @default.
- W2069673747 hasConceptScore W2069673747C2780497637 @default.
- W2069673747 hasConceptScore W2069673747C520434653 @default.
- W2069673747 hasFunder F4320321001 @default.
- W2069673747 hasIssue "8" @default.
- W2069673747 hasLocation W20696737471 @default.
- W2069673747 hasLocation W20696737472 @default.
- W2069673747 hasOpenAccess W2069673747 @default.
- W2069673747 hasPrimaryLocation W20696737471 @default.
- W2069673747 hasRelatedWork W1967069877 @default.
- W2069673747 hasRelatedWork W1974429658 @default.
- W2069673747 hasRelatedWork W1980532511 @default.
- W2069673747 hasRelatedWork W2068689093 @default.
- W2069673747 hasRelatedWork W2069673747 @default.
- W2069673747 hasRelatedWork W2080516913 @default.
- W2069673747 hasRelatedWork W2093184085 @default.
- W2069673747 hasRelatedWork W2277764486 @default.
- W2069673747 hasRelatedWork W4321273561 @default.
- W2069673747 hasRelatedWork W2135980133 @default.
- W2069673747 hasVolume "85" @default.
- W2069673747 isParatext "false" @default.
- W2069673747 isRetracted "false" @default.
- W2069673747 magId "2069673747" @default.
- W2069673747 workType "article" @default.