Matches in SemOpenAlex for { <https://semopenalex.org/work/W2069783556> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2069783556 abstract "We have developed a new III-V self-aligned Quantum-Well MOSFET (QW-MOSFET) architecture that features a scalable highly conducting ledge over the channel access region. The extensive use of RIE and digital etching techniques enables the precise design of the length and thickness of the ledge and allows the careful balancing of performance against short-channel effects. We demonstrate L <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>g</sub> =70 nm InAs MOSFETs with a ledge length of 5 nm that feature a record g <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>m</sub> of 2.7 mS/μm. Separately, devices with a ledge length of 70 nm yield a record ON-current of 410 μA/μm (V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>dd</sub> =0.5 V and I <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>off</sub> =100 nA/μm). We also demonstrate working MOSFETs with L <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>g</sub> = 20 nm and a very tight metal contact spacing. Devices with a 5 nm ledge length reveal for the first time the existence of off-state leakage (GIDL) in III-V MOSFETs." @default.
- W2069783556 created "2016-06-24" @default.
- W2069783556 creator A5013286083 @default.
- W2069783556 creator A5052777211 @default.
- W2069783556 creator A5056314310 @default.
- W2069783556 creator A5073869547 @default.
- W2069783556 creator A5084053130 @default.
- W2069783556 date "2013-12-01" @default.
- W2069783556 modified "2023-09-23" @default.
- W2069783556 title "A new self-aligned quantum-well MOSFET architecture fabricated by a scalable tight-pitch process" @default.
- W2069783556 cites W1984772856 @default.
- W2069783556 cites W2022155512 @default.
- W2069783556 cites W2055566925 @default.
- W2069783556 cites W2064395529 @default.
- W2069783556 cites W4244093052 @default.
- W2069783556 doi "https://doi.org/10.1109/iedm.2013.6724640" @default.
- W2069783556 hasPublicationYear "2013" @default.
- W2069783556 type Work @default.
- W2069783556 sameAs 2069783556 @default.
- W2069783556 citedByCount "48" @default.
- W2069783556 countsByYear W20697835562014 @default.
- W2069783556 countsByYear W20697835562015 @default.
- W2069783556 countsByYear W20697835562016 @default.
- W2069783556 countsByYear W20697835562017 @default.
- W2069783556 countsByYear W20697835562018 @default.
- W2069783556 countsByYear W20697835562019 @default.
- W2069783556 countsByYear W20697835562020 @default.
- W2069783556 countsByYear W20697835562021 @default.
- W2069783556 countsByYear W20697835562022 @default.
- W2069783556 crossrefType "proceedings-article" @default.
- W2069783556 hasAuthorship W2069783556A5013286083 @default.
- W2069783556 hasAuthorship W2069783556A5052777211 @default.
- W2069783556 hasAuthorship W2069783556A5056314310 @default.
- W2069783556 hasAuthorship W2069783556A5073869547 @default.
- W2069783556 hasAuthorship W2069783556A5084053130 @default.
- W2069783556 hasConcept C119599485 @default.
- W2069783556 hasConcept C121332964 @default.
- W2069783556 hasConcept C127413603 @default.
- W2069783556 hasConcept C165801399 @default.
- W2069783556 hasConcept C172385210 @default.
- W2069783556 hasConcept C184720557 @default.
- W2069783556 hasConcept C2778413303 @default.
- W2069783556 hasConcept C41008148 @default.
- W2069783556 hasConcept C48044578 @default.
- W2069783556 hasConcept C49040817 @default.
- W2069783556 hasConcept C62520636 @default.
- W2069783556 hasConcept C77088390 @default.
- W2069783556 hasConceptScore W2069783556C119599485 @default.
- W2069783556 hasConceptScore W2069783556C121332964 @default.
- W2069783556 hasConceptScore W2069783556C127413603 @default.
- W2069783556 hasConceptScore W2069783556C165801399 @default.
- W2069783556 hasConceptScore W2069783556C172385210 @default.
- W2069783556 hasConceptScore W2069783556C184720557 @default.
- W2069783556 hasConceptScore W2069783556C2778413303 @default.
- W2069783556 hasConceptScore W2069783556C41008148 @default.
- W2069783556 hasConceptScore W2069783556C48044578 @default.
- W2069783556 hasConceptScore W2069783556C49040817 @default.
- W2069783556 hasConceptScore W2069783556C62520636 @default.
- W2069783556 hasConceptScore W2069783556C77088390 @default.
- W2069783556 hasLocation W20697835561 @default.
- W2069783556 hasOpenAccess W2069783556 @default.
- W2069783556 hasPrimaryLocation W20697835561 @default.
- W2069783556 hasRelatedWork W1525643724 @default.
- W2069783556 hasRelatedWork W1527726406 @default.
- W2069783556 hasRelatedWork W2067938758 @default.
- W2069783556 hasRelatedWork W2302028273 @default.
- W2069783556 hasRelatedWork W2333420780 @default.
- W2069783556 hasRelatedWork W2364921833 @default.
- W2069783556 hasRelatedWork W2375199418 @default.
- W2069783556 hasRelatedWork W2382623646 @default.
- W2069783556 hasRelatedWork W2388030554 @default.
- W2069783556 hasRelatedWork W3087771547 @default.
- W2069783556 isParatext "false" @default.
- W2069783556 isRetracted "false" @default.
- W2069783556 magId "2069783556" @default.
- W2069783556 workType "article" @default.