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• W2069789898 abstract "This paper reports the wireless control of bulk-micromachined shape-memory-alloy actuators using external radiofrequency magnetic fields and its application to microgrippers. The frequency-sensitive wireless resonant heater to which the gripper actuator is bonded is activated only when the field frequency is tuned to the resonant frequency of the heater. A batch-compatible bonding technique based on photo-defined copper electroplating is developed to mechanically and thermally couple the gripper with the planar heater circuit fabricated using copper-clad polyimide film. The actuation range of 600 μm as the tip opening distance is obtained with normally closed 5-mm long grippers at a device temperature of 92 °C. The field frequency range to which the devices with 140-MHz resonant frequency respond is measured to be ∼13 MHz about the resonant frequency. The manipulation of vertically aligned carbon-nanotube forests is experimentally demonstrated. Mechanical stress tests for the bond formed by the developed electroplating bonding method show a shear strength greater than 40 MPa." @default.
• W2069789898 created "2016-06-24" @default.
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• W2069789898 date "2010-09-01" @default.
• W2069789898 modified "2023-10-18" @default.
• W2069789898 title "Frequency-controlled wireless shape-memory-alloy microactuators integrated using an electroplating bonding process" @default.
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• W2069789898 doi "https://doi.org/10.1016/j.sna.2010.08.007" @default.
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