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- W2069884865 abstract "ABSTRACTThe BRDF of a MgF2 protected Al mirror contaminated with dust particulates due to exposure to the laboratory environment has been measured and is presented for wavelengthsof 633nm, 325nm, 121.6nm and 74.Onm. This experimental data is compared with theoreticalpredictions arising from the OPALS modelling software. This model calculates the BRDFbased on the measured particulate distribution found on the surface, and the optical constantsof the contaminant. The OPALS software shows promise as a useful tool in the design phaseof optical instruments: for drawing up contamination budgets and for incorporation into straylight analysis predicting instrument performance.Keywords: EUV, scatter, ultraviolet, BRDF, contamination, particulate, dust 1. INTRODUCTIONWhile every effort is made to control particulate contamination of optical surfaces during instrument development, inevitably particulates agglomerate on surfaces, and indeed maycontinue to do so even after instrument deployment. In a well designed system employing lowscatter optics, these particulate contaminants may be the dominant source of stray radiation." @default.
- W2069884865 created "2016-06-24" @default.
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- W2069884865 date "1995-09-01" @default.
- W2069884865 modified "2023-09-26" @default.
- W2069884865 title "<title>Extreme ultraviolet scatter from particulate-contaminated mirrors</title>" @default.
- W2069884865 doi "https://doi.org/10.1117/12.218335" @default.
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