FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2069936706> ?p ?o ?g. }

• W2069936706 abstract "Lanthanum (La) incorporation into Hf-silicate high-permittivity (high-k) gate dielectrics was conducted using a physical-vapor-deposition (PVD)-based in situ method. PVD-grown metal Hf, La, and Hf–La alloys on base SiO2 oxides received in situ annealing to form high-quality HfLaSiO dielectrics, and subsequent deposition of metal gate electrodes was carried out to fabricate advanced metal/high-k gate stacks without breaking vacuum. The in situ method was found to precisely control La content and its depth profile and to tune the effective work function of metal/high-k stacks. Remarkable leakage current reduction of almost seven orders of magnitude compared with conventional poly-Si/SiO2 stacks and excellent interface properties comparable to an ideal SiO2/Si interface were also achieved at an equivalent oxide thickness of around 1.0 nm. Our x-ray photoelectron spectroscopy analysis revealed that, as previously suggested, effective work function modulation due to La incorporation is attributed to the interface dipole (or localized sheet charge) at the bottom high-k/SiO2 interface, which is crucially dependent on the La content at the interface. Moreover, it was found that high-temperature annealing causing interface oxide growth leads to redistribution of La atoms and forms the uppermost La-silicate layer at the metal/high-k interface by releasing the dipole moment at the bottom high-k/SiO2 interface. Based on these physical and electrical characterizations, the advantages and process guidelines for La-incorporated dielectrics were discussed in detail." @default.
• W2069936706 created "2016-06-24" @default.
• W2069936706 creator A5000177152 @default.
• W2069936706 creator A5005695208 @default.
• W2069936706 creator A5008942687 @default.
• W2069936706 creator A5029940832 @default.
• W2069936706 creator A5056128134 @default.
• W2069936706 creator A5061635765 @default.
• W2069936706 creator A5065080977 @default.
• W2069936706 date "2010-02-01" @default.
• W2069936706 modified "2023-09-23" @default.
• W2069936706 title "Fabrication of advanced La-incorporated Hf-silicate gate dielectrics using physical-vapor-deposition-based <i>in situ</i> method and its effective work function modulation of metal/high-k stacks" @default.
• W2069936706 cites W1611650845 @default.
• W2069936706 cites W1619890411 @default.
• W2069936706 cites W1970200102 @default.
• W2069936706 cites W1973541168 @default.
• W2069936706 cites W1992154479 @default.
• W2069936706 cites W1996951760 @default.
• W2069936706 cites W2005260136 @default.
• W2069936706 cites W2012471404 @default.
• W2069936706 cites W2013666489 @default.
• W2069936706 cites W2016791517 @default.
• W2069936706 cites W2022165908 @default.
• W2069936706 cites W2026750988 @default.
• W2069936706 cites W2053674573 @default.
• W2069936706 cites W2055387949 @default.
• W2069936706 cites W2081009235 @default.
• W2069936706 cites W2083021618 @default.
• W2069936706 cites W2089596301 @default.
• W2069936706 cites W2171508286 @default.
• W2069936706 cites W2326720525 @default.
• W2069936706 doi "https://doi.org/10.1063/1.3284952" @default.
• W2069936706 hasPublicationYear "2010" @default.
• W2069936706 type Work @default.
• W2069936706 sameAs 2069936706 @default.
• W2069936706 citedByCount "11" @default.
• W2069936706 countsByYear W20699367062012 @default.
• W2069936706 countsByYear W20699367062014 @default.
• W2069936706 countsByYear W20699367062015 @default.
• W2069936706 countsByYear W20699367062016 @default.
• W2069936706 crossrefType "journal-article" @default.
• W2069936706 hasAuthorship W2069936706A5000177152 @default.
• W2069936706 hasAuthorship W2069936706A5005695208 @default.
• W2069936706 hasAuthorship W2069936706A5008942687 @default.
• W2069936706 hasAuthorship W2069936706A5029940832 @default.
• W2069936706 hasAuthorship W2069936706A5056128134 @default.
• W2069936706 hasAuthorship W2069936706A5061635765 @default.
• W2069936706 hasAuthorship W2069936706A5065080977 @default.
• W2069936706 hasConcept C113196181 @default.
• W2069936706 hasConcept C115235246 @default.
• W2069936706 hasConcept C119599485 @default.
• W2069936706 hasConcept C127413603 @default.
• W2069936706 hasConcept C133386390 @default.
• W2069936706 hasConcept C159985019 @default.
• W2069936706 hasConcept C16317505 @default.
• W2069936706 hasConcept C165801399 @default.
• W2069936706 hasConcept C166972891 @default.
• W2069936706 hasConcept C168651791 @default.
• W2069936706 hasConcept C171250308 @default.
• W2069936706 hasConcept C172385210 @default.
• W2069936706 hasConcept C175708663 @default.
• W2069936706 hasConcept C185592680 @default.
• W2069936706 hasConcept C19067145 @default.
• W2069936706 hasConcept C191897082 @default.
• W2069936706 hasConcept C192562407 @default.
• W2069936706 hasConcept C2361726 @default.
• W2069936706 hasConcept C2777855556 @default.
• W2069936706 hasConcept C2779227376 @default.
• W2069936706 hasConcept C2779851234 @default.
• W2069936706 hasConcept C36003996 @default.
• W2069936706 hasConcept C42360764 @default.
• W2069936706 hasConcept C43617362 @default.
• W2069936706 hasConcept C49040817 @default.
• W2069936706 hasConcept C51140833 @default.
• W2069936706 hasConcept C51576277 @default.
• W2069936706 hasConcept C52780932 @default.
• W2069936706 hasConcept C57410435 @default.
• W2069936706 hasConceptScore W2069936706C113196181 @default.
• W2069936706 hasConceptScore W2069936706C115235246 @default.
• W2069936706 hasConceptScore W2069936706C119599485 @default.
• W2069936706 hasConceptScore W2069936706C127413603 @default.
• W2069936706 hasConceptScore W2069936706C133386390 @default.
• W2069936706 hasConceptScore W2069936706C159985019 @default.
• W2069936706 hasConceptScore W2069936706C16317505 @default.
• W2069936706 hasConceptScore W2069936706C165801399 @default.
• W2069936706 hasConceptScore W2069936706C166972891 @default.
• W2069936706 hasConceptScore W2069936706C168651791 @default.
• W2069936706 hasConceptScore W2069936706C171250308 @default.
• W2069936706 hasConceptScore W2069936706C172385210 @default.
• W2069936706 hasConceptScore W2069936706C175708663 @default.
• W2069936706 hasConceptScore W2069936706C185592680 @default.
• W2069936706 hasConceptScore W2069936706C19067145 @default.
• W2069936706 hasConceptScore W2069936706C191897082 @default.
• W2069936706 hasConceptScore W2069936706C192562407 @default.
• W2069936706 hasConceptScore W2069936706C2361726 @default.
• W2069936706 hasConceptScore W2069936706C2777855556 @default.
• W2069936706 hasConceptScore W2069936706C2779227376 @default.
• W2069936706 hasConceptScore W2069936706C2779851234 @default.
• W2069936706 hasConceptScore W2069936706C36003996 @default.
• W2069936706 hasConceptScore W2069936706C42360764 @default.

• next