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- W2070104974 abstract "A mechanism of compositional deviation of Ba-Y-Cu-O films during sputtering has been investigated, and a process for obtaining as-deposited superconducting films from a stoichiometric target has been developed. The main factor of the deviation is the radiation of high-energy electrons emitted from the oxide target with a low work function onto the growing surface. By eliminating the electron bombardment, films with the same composition were obtained reproducibly. As-grown films 4000 Å thick deposited at 580°C showed T c ( ρ=0) of 82.5 K and an excellent surface smoothness." @default.
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- W2070104974 date "1988-04-01" @default.
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- W2070104974 title "Sputter Synthesis of Ba<sub>2</sub>YCu<sub>3</sub>O<sub>y</sub> As-Deposited Superconducting Thin Films from Stoichiometric Target–A Mechanism of Compositional Deviation and Its Control" @default.
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- W2070104974 doi "https://doi.org/10.1143/jjap.27.l639" @default.
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