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- W2070147486 abstract "Charging and topography evolution simulations during plasma etching of dense line-and-space patterns reveal that multiple-feature effects influence critically the etch profile characteristics of the various lines. By including neighboring lines, the simulation predicts a peculiar notching behavior, where the extent of notching varies with the location of the line. Feature-scale modeling can no longer be focused on individual features alone; “adjacency” effects are crucial for understanding and predicting the outcome of etching experiments at reduced device dimensions." @default.
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- W2070147486 title "Prediction of multiple-feature effects in plasma etching" @default.
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- W2070147486 doi "https://doi.org/10.1063/1.118878" @default.
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