Matches in SemOpenAlex for { <https://semopenalex.org/work/W2070293403> ?p ?o ?g. }
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85
with 100 items per page.
- W2070293403 endingPage "315" @default.
- W2070293403 startingPage "307" @default.
- W2070293403 abstract "This paper discusses the reliability characterization of thermal micro-structures implemented on industrial 0.8 μm CMOS chips. Various degradation and failure mechanisms are identified and evaluated under high temperature operation. At high temperatures the mechanisms are many and varied, and co-incidental thermally-induced mechanical defects are found in both the poly-Si heater and the poly-Si temperature sensor, along with temperature- and current-enhanced interlayer diffusion degradation of the heater contacts. Local reduction in the device thermal capacity by using silicon micro-machining can be expected to hold the promise of a number of significant advantages, especially for limiting current stressing of the contact regions. The results can be used to optimize the design of thermally based micro-sensors on CMOS chips, such as CMOS compatible chemoresistive gas sensors." @default.
- W2070293403 created "2016-06-24" @default.
- W2070293403 creator A5012242751 @default.
- W2070293403 creator A5055054579 @default.
- W2070293403 creator A5069532716 @default.
- W2070293403 creator A5083800062 @default.
- W2070293403 date "2001-02-01" @default.
- W2070293403 modified "2023-10-13" @default.
- W2070293403 title "Reliability aspects of thermal micro-structures implemented on industrial 0.8 μm CMOS chips" @default.
- W2070293403 cites W1963581953 @default.
- W2070293403 cites W1979535776 @default.
- W2070293403 cites W2024199595 @default.
- W2070293403 cites W2031806087 @default.
- W2070293403 cites W2054273073 @default.
- W2070293403 cites W2057209277 @default.
- W2070293403 cites W2067047040 @default.
- W2070293403 cites W2090664140 @default.
- W2070293403 cites W2135146850 @default.
- W2070293403 cites W2138054929 @default.
- W2070293403 cites W2142043156 @default.
- W2070293403 cites W2145957393 @default.
- W2070293403 cites W2157955844 @default.
- W2070293403 doi "https://doi.org/10.1016/s0026-2714(00)00226-2" @default.
- W2070293403 hasPublicationYear "2001" @default.
- W2070293403 type Work @default.
- W2070293403 sameAs 2070293403 @default.
- W2070293403 citedByCount "3" @default.
- W2070293403 crossrefType "journal-article" @default.
- W2070293403 hasAuthorship W2070293403A5012242751 @default.
- W2070293403 hasAuthorship W2070293403A5055054579 @default.
- W2070293403 hasAuthorship W2070293403A5069532716 @default.
- W2070293403 hasAuthorship W2070293403A5083800062 @default.
- W2070293403 hasConcept C119599485 @default.
- W2070293403 hasConcept C121332964 @default.
- W2070293403 hasConcept C127413603 @default.
- W2070293403 hasConcept C153294291 @default.
- W2070293403 hasConcept C163258240 @default.
- W2070293403 hasConcept C188198153 @default.
- W2070293403 hasConcept C192562407 @default.
- W2070293403 hasConcept C204530211 @default.
- W2070293403 hasConcept C24326235 @default.
- W2070293403 hasConcept C2779679103 @default.
- W2070293403 hasConcept C43214815 @default.
- W2070293403 hasConcept C46362747 @default.
- W2070293403 hasConcept C49040817 @default.
- W2070293403 hasConcept C544956773 @default.
- W2070293403 hasConcept C62520636 @default.
- W2070293403 hasConcept C78519656 @default.
- W2070293403 hasConceptScore W2070293403C119599485 @default.
- W2070293403 hasConceptScore W2070293403C121332964 @default.
- W2070293403 hasConceptScore W2070293403C127413603 @default.
- W2070293403 hasConceptScore W2070293403C153294291 @default.
- W2070293403 hasConceptScore W2070293403C163258240 @default.
- W2070293403 hasConceptScore W2070293403C188198153 @default.
- W2070293403 hasConceptScore W2070293403C192562407 @default.
- W2070293403 hasConceptScore W2070293403C204530211 @default.
- W2070293403 hasConceptScore W2070293403C24326235 @default.
- W2070293403 hasConceptScore W2070293403C2779679103 @default.
- W2070293403 hasConceptScore W2070293403C43214815 @default.
- W2070293403 hasConceptScore W2070293403C46362747 @default.
- W2070293403 hasConceptScore W2070293403C49040817 @default.
- W2070293403 hasConceptScore W2070293403C544956773 @default.
- W2070293403 hasConceptScore W2070293403C62520636 @default.
- W2070293403 hasConceptScore W2070293403C78519656 @default.
- W2070293403 hasIssue "2" @default.
- W2070293403 hasLocation W20702934031 @default.
- W2070293403 hasOpenAccess W2070293403 @default.
- W2070293403 hasPrimaryLocation W20702934031 @default.
- W2070293403 hasRelatedWork W2025257136 @default.
- W2070293403 hasRelatedWork W2169415604 @default.
- W2070293403 hasRelatedWork W2171986175 @default.
- W2070293403 hasRelatedWork W2363620142 @default.
- W2070293403 hasRelatedWork W2370255709 @default.
- W2070293403 hasRelatedWork W2562383580 @default.
- W2070293403 hasRelatedWork W2617868873 @default.
- W2070293403 hasRelatedWork W3014521742 @default.
- W2070293403 hasRelatedWork W3204141294 @default.
- W2070293403 hasRelatedWork W4306968100 @default.
- W2070293403 hasVolume "41" @default.
- W2070293403 isParatext "false" @default.
- W2070293403 isRetracted "false" @default.
- W2070293403 magId "2070293403" @default.
- W2070293403 workType "article" @default.