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- W2070401265 abstract "Focused ion beams constitute an important emerging technology that has many significant advantages for the fabrication of submicron ICs. These advantages are described vis-a-vis the currently dominant methods of pattern generation and transfer. A commercial focused ion beam system is outlined in the context of major design considerations. Probable FIB applications are also discussed.© (1983) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2070401265 date "1983-11-07" @default.
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- W2070401265 title "<title>A Focused Ion Beam System For The Generation Of Submicron Patterns</title>" @default.
- W2070401265 doi "https://doi.org/10.1117/12.935106" @default.
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