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- W2070403243 abstract "In order to determine the type and charge states of dominant point defects in As- and B-doped silicon, self-diffusion in doped natural Si/30Si/natural Si double-heterostructures has been investigated under oxidizing ambient. Enhanced self-diffusion is observed in B-doped Si, while retarded self-diffusion is observed in As-doped Si. These results indicate that single-charged Si self-interstitals (I+ donors) are dominant in B-doped Si, while excess single-charged vacancies (V− acceptors) exist in As-doped Si." @default.
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- W2070403243 date "2003-02-01" @default.
- W2070403243 modified "2023-09-24" @default.
- W2070403243 title "Type and charge states of point defects in heavily As- and B-doped silicon" @default.
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- W2070403243 doi "https://doi.org/10.1016/s1369-8001(03)00066-0" @default.
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