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- W2070407544 abstract "We measured Si L 2,3 soft-X-ray emission spectra from Mo/Si multilayers annealed at 400°C. We showed that MoSi 2 was formed at the interface, and the thickness of the MoSi 2 interlayer increased with the annealing time. By an analysis of the soft-X-ray emission spectra and the patterns of small-angle X-ray diffraction, we estimated the thickness of the MoSi 2 interlayer and a diffusion coefficient between Mo and Si at 400°C as 1.1 (± 0.2) × 10 -18 cm 2 / s . We showed that soft-X-ray emission spectroscopy is a useful tool for studying the thermal change of the buried interface nondestructively." @default.
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- W2070407544 date "2002-04-01" @default.
- W2070407544 modified "2023-09-24" @default.
- W2070407544 title "BURIED INTERFACES OF HEAT-LOADED Mo/Si MULTILAYERS STUDIED BY SOFT-X-RAY EMISSION SPECTROSCOPY" @default.
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- W2070407544 doi "https://doi.org/10.1142/s0218625x0200283x" @default.
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