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• W2070478092 abstract "A tunable reflecting micromirror made up of two layers of Al and Si3N4 is designed to suspend between the siliconsubstrate and the heat sensitive membrane for measuring the actual temperature and color of an object based oncomparison of two wavelength response windows, 3-5 μm and 8-12 μm. The micromirror, switching between twopositions by an applied electrostatic voltage, provides a response to two wavelength windows by tuning the opticaltunable resonant cavity. With different distances between the micromirror and the bottom electrode, the total capacitanceof the tunable micromirror is gained based on electromagnetic analysis and theoretical equation. The pull-in voltage iscalculated as 8.21 V by electrostatic-mechanical coupling analysis. But if the voltage is increased to about 9.73 V, themicromirror will touch the bottom electrode by pull-in behavior. At last, the vibration modes of the tunable micromirrorare simulated using ANSYS, and the fabrication process flow of the two-color microbolometer is theoreticallydemonstrated." @default.
• W2070478092 created "2016-06-24" @default.
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• W2070478092 date "2009-11-04" @default.
• W2070478092 modified "2023-10-15" @default.
• W2070478092 title "Design and simulation of tunable micromirror for two-color microbolometer" @default.
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• W2070478092 doi "https://doi.org/10.1117/12.837798" @default.
• W2070478092 hasPublicationYear "2009" @default.
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