Matches in SemOpenAlex for { <https://semopenalex.org/work/W2070502021> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2070502021 endingPage "4" @default.
- W2070502021 startingPage "1" @default.
- W2070502021 abstract "A convenient lithographic technique is proposed in this paper, which can be used to produce subdiffraction-limit arrays of nanopatterns over large areas (about several square centimeters). An array of polystyrene spheres (PS) is arranged on the surface of a layer of silver which has a thickness of about tens of nanometers. With the normal illumination light of wavelength 365 nm perpendicular to the substrate, PS can generate an array of optical patterns with high intensity at their contact points with silver. By designing the silver slab, the evanescent waves that carry subwavelength information about the optical patterns are substantially enhanced, while propagating components are restrained. In the photoresist which is on the other side of silver, the optical intensity is redistributed and subdiffraction-limit patterns are obtained after exposure and development. Simulation by finite-difference time-domain (FDTD) and experiments were carried out to verify the technique. The results show that by using PS with diameter of 600 nm, nanopatterns with dimension of less than 80 nm can be obtained." @default.
- W2070502021 created "2016-06-24" @default.
- W2070502021 creator A5029142767 @default.
- W2070502021 creator A5032540555 @default.
- W2070502021 creator A5047937368 @default.
- W2070502021 creator A5067386077 @default.
- W2070502021 creator A5071968752 @default.
- W2070502021 date "2008-01-01" @default.
- W2070502021 modified "2023-10-14" @default.
- W2070502021 title "A Method for Fabricating Arrays of Nanopatterns with the Feature Size beyond Diffraction Limit" @default.
- W2070502021 cites W1990299300 @default.
- W2070502021 cites W1995243747 @default.
- W2070502021 cites W1996476293 @default.
- W2070502021 cites W2003253589 @default.
- W2070502021 cites W2068557395 @default.
- W2070502021 cites W2082722309 @default.
- W2070502021 cites W2086367844 @default.
- W2070502021 cites W2086523299 @default.
- W2070502021 cites W2097179377 @default.
- W2070502021 cites W2102030343 @default.
- W2070502021 doi "https://doi.org/10.1155/2008/492478" @default.
- W2070502021 hasPublicationYear "2008" @default.
- W2070502021 type Work @default.
- W2070502021 sameAs 2070502021 @default.
- W2070502021 citedByCount "1" @default.
- W2070502021 countsByYear W20705020212013 @default.
- W2070502021 crossrefType "journal-article" @default.
- W2070502021 hasAuthorship W2070502021A5029142767 @default.
- W2070502021 hasAuthorship W2070502021A5032540555 @default.
- W2070502021 hasAuthorship W2070502021A5047937368 @default.
- W2070502021 hasAuthorship W2070502021A5067386077 @default.
- W2070502021 hasAuthorship W2070502021A5071968752 @default.
- W2070502021 hasBestOaLocation W20705020211 @default.
- W2070502021 hasConcept C105487726 @default.
- W2070502021 hasConcept C111368507 @default.
- W2070502021 hasConcept C120665830 @default.
- W2070502021 hasConcept C121332964 @default.
- W2070502021 hasConcept C127313418 @default.
- W2070502021 hasConcept C134406635 @default.
- W2070502021 hasConcept C159985019 @default.
- W2070502021 hasConcept C171250308 @default.
- W2070502021 hasConcept C184880428 @default.
- W2070502021 hasConcept C192562407 @default.
- W2070502021 hasConcept C199631012 @default.
- W2070502021 hasConcept C204223013 @default.
- W2070502021 hasConcept C207114421 @default.
- W2070502021 hasConcept C2524010 @default.
- W2070502021 hasConcept C2777289219 @default.
- W2070502021 hasConcept C2777922577 @default.
- W2070502021 hasConcept C2779227376 @default.
- W2070502021 hasConcept C33923547 @default.
- W2070502021 hasConcept C49040817 @default.
- W2070502021 hasConcept C521977710 @default.
- W2070502021 hasConcept C6260449 @default.
- W2070502021 hasConcept C77066764 @default.
- W2070502021 hasConceptScore W2070502021C105487726 @default.
- W2070502021 hasConceptScore W2070502021C111368507 @default.
- W2070502021 hasConceptScore W2070502021C120665830 @default.
- W2070502021 hasConceptScore W2070502021C121332964 @default.
- W2070502021 hasConceptScore W2070502021C127313418 @default.
- W2070502021 hasConceptScore W2070502021C134406635 @default.
- W2070502021 hasConceptScore W2070502021C159985019 @default.
- W2070502021 hasConceptScore W2070502021C171250308 @default.
- W2070502021 hasConceptScore W2070502021C184880428 @default.
- W2070502021 hasConceptScore W2070502021C192562407 @default.
- W2070502021 hasConceptScore W2070502021C199631012 @default.
- W2070502021 hasConceptScore W2070502021C204223013 @default.
- W2070502021 hasConceptScore W2070502021C207114421 @default.
- W2070502021 hasConceptScore W2070502021C2524010 @default.
- W2070502021 hasConceptScore W2070502021C2777289219 @default.
- W2070502021 hasConceptScore W2070502021C2777922577 @default.
- W2070502021 hasConceptScore W2070502021C2779227376 @default.
- W2070502021 hasConceptScore W2070502021C33923547 @default.
- W2070502021 hasConceptScore W2070502021C49040817 @default.
- W2070502021 hasConceptScore W2070502021C521977710 @default.
- W2070502021 hasConceptScore W2070502021C6260449 @default.
- W2070502021 hasConceptScore W2070502021C77066764 @default.
- W2070502021 hasFunder F4320321001 @default.
- W2070502021 hasLocation W20705020211 @default.
- W2070502021 hasOpenAccess W2070502021 @default.
- W2070502021 hasPrimaryLocation W20705020211 @default.
- W2070502021 hasRelatedWork W2007719210 @default.
- W2070502021 hasRelatedWork W2012226971 @default.
- W2070502021 hasRelatedWork W2023999549 @default.
- W2070502021 hasRelatedWork W2036968101 @default.
- W2070502021 hasRelatedWork W2052701855 @default.
- W2070502021 hasRelatedWork W2054880524 @default.
- W2070502021 hasRelatedWork W2088177488 @default.
- W2070502021 hasRelatedWork W2381330663 @default.
- W2070502021 hasRelatedWork W3007549791 @default.
- W2070502021 hasRelatedWork W2514501518 @default.
- W2070502021 hasVolume "2008" @default.
- W2070502021 isParatext "false" @default.
- W2070502021 isRetracted "false" @default.
- W2070502021 magId "2070502021" @default.
- W2070502021 workType "article" @default.