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- W2070508700 abstract "The chemical reactions and the dissolution properties of homopolymeric PMMA and a P(MMA-co-MAA) copolymer were investigated during DUV (KrF, 248 nm) and e-beam exposure. The chain scission reaction was analyzed using GPC. The polymer degradation reaction is very similar at both exposure procedures. In both cases a bimodal and, later, a multimodal character of the molecular weight distribution is observed." @default.
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- W2070508700 date "1998-06-29" @default.
- W2070508700 modified "2023-09-26" @default.
- W2070508700 title "E-beam and deep-UV exposure of PMMA-based resists: identical or different chemical behavior?" @default.
- W2070508700 doi "https://doi.org/10.1117/12.312404" @default.
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