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- W2070735351 abstract "The lattice strain is studied of proton implanted GaP and GaAs as a function of the incidence angle and energy of protons. With decreasing angle of incidence the maximum strain near the end of proton range decreases whereas the mean strain near the crystal surface increases. On the other side an increase of the proton energy at fixed incidence yields a decrease of both maximum and mean strain. These experimental findings can be explained by considering the corresponding changes of the damage profile, especially the effect of lateral and longitudinal spread of the protons. Thus it could be confirmed that the depth profile of strain is strongly determined by the dependence of the damage profile and hydrogen peak on the parameters varied.Die Gitterverzerrung von protonenimplantiertem GaP and GaAs wird in Abhangigkeit vom Einschuswinkel und der Inzidenzenergie untersucht. Die maximale Verzerrung am Reichweitenende der Protonen verringert sich bei flacherem Einschus, wahrend die mittlere Verzerrung in Oberflachennahe anwachst. Andererseits fuhrt eine Vergroserung der Einschusenergie der Protonen zu einer Abnahme sowohl der maximalen als auch der mittleren Verzerrung. Diese experimentellen Resultate konnen mit den entsprechenden Anderungen des Strahlenschadenprofiles, speziell mit der Wirkung der lateralen und longitudinalen Streubreite der Protonen erklart werden. Es ergibt sich, das das Tiefenprofil der Gitterverzerrung durch die Abhangigkeit des Strahlenschadenprofiles und der Wasserstoffverteilung von den variierten Parametern bestimmt wird." @default.
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- W2070735351 date "1990-01-16" @default.
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- W2070735351 title "The Effect of the Lateral and Longitudinal Spread of Fast Protons on Strain Production in GaP and GaAs" @default.
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- W2070735351 doi "https://doi.org/10.1002/pssa.2211170105" @default.
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