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- W2070748114 abstract "We have developed a laser and focused ion beam (FIB) compound process for press mold dies of a micro lens array (MLA) and a micro needle array (MNA) in a glassy carbon (GC). The press mold die of the MLA was roughly fabricated by UV-YAG laser. After this process, we finished this surface by scanning FIB. As a result, higher accuracy and good roughness of surface profile can be realized. An optical glass is used to confirm the shape of lens. Moreover, we fabricated 6 × 6 through-holes in the GC by the spiral drilling in addition to the focus position movement of the UV laser for press mold die of the MNA. After the FIB process, we were able to make the needle die of surface and hole wall roughness less than 0.9 μm. A silicon rubber is used to confirm the shape of the holes." @default.
- W2070748114 created "2016-06-24" @default.
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- W2070748114 date "2012-02-01" @default.
- W2070748114 modified "2023-09-26" @default.
- W2070748114 title "Laser and focused ion beam combined machining for micro dies" @default.
- W2070748114 cites W1965909226 @default.
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- W2070748114 doi "https://doi.org/10.1063/1.3662018" @default.
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- W2070748114 hasPublicationYear "2012" @default.
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