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• W2070869076 abstract "ABSTRACT The development of micro-machined ultrasonic transducers on silicon opens new application fields for Si-based acoustic sensors operating in air or in liquids. In this work, we describe the fabrication of piezoelectric micro-machined ultrasonic transducers (pMUT) first dedicated to ultrasonic imaging applications that may be used as a mechanical to electrical energy transformer for energy scavenging purpose [1 Roundy, S., Kenneth Wright, P. and Rabaey, J. M. 2004. Energy scavenging for wireless sensor networks with Special Focus on Vibrations, I-4020–7663-0. Kulwer Academic Publishers. [Crossref] , [Google Scholar]]. We report on the fabrication of PZT/Si piezoelectric micro-machined ultrasonic transducers (pMUTs) first designed for acoustic applications and on tests of these devices as scavenging energy experiment." @default.
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• W2070869076 date "2006-11-01" @default.
• W2070869076 modified "2023-10-17" @default.
• W2070869076 title "A Bi-STABLE MICRO-MACHINED PIEZOELECTRIC TRANSDUCER FOR MECHANICAL TO ELECTRICAL ENERGY TRANSFORMATION" @default.
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• W2070869076 doi "https://doi.org/10.1080/10584580600659878" @default.
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