Matches in SemOpenAlex for { <https://semopenalex.org/work/W2070955242> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2070955242 abstract "The first capillary discharge produced plasma extreme ultraviolet source has been started in China. Fundamental characteristics of DPP including current, Xe gas pressure, extreme ultraviolet energy and spectrum in extreme ultraviolet region have been studied. A high voltage power source is employed, which voltage can be changed from 20kV to 30kV, and the current is from 25kA to 45kA with a FWHM of 120ns. The high voltage is loaded between the capillary which is 3mm in diameter and 12mm in length by injected Xe gas to achieve extreme ultraviolet radiation mostly in the region 10nm~18nm developed in framework of an extreme ultraviolet lithograph program. It is founded that the in-band (13.5nm, 2% bandwidth) energy is increasing with decreasing Xe gas pressure and/or increasing the current in the region 5~10Pa and 25kA~45kA. And 0.56J/2π sr/pulse energy (13.5nm, 2% bandwidth) can be got when the input energy is 47.7J, and the conversion efficiency is 0.56%." @default.
- W2070955242 created "2016-06-24" @default.
- W2070955242 creator A5015195367 @default.
- W2070955242 creator A5052084331 @default.
- W2070955242 creator A5054217340 @default.
- W2070955242 creator A5066605155 @default.
- W2070955242 creator A5067366339 @default.
- W2070955242 creator A5070546385 @default.
- W2070955242 date "2010-07-01" @default.
- W2070955242 modified "2023-09-26" @default.
- W2070955242 title "Observations and analysis of extreme ultraviolet emission by capillary discharge with Xe as target" @default.
- W2070955242 cites W1968685949 @default.
- W2070955242 cites W1976999434 @default.
- W2070955242 cites W1994089650 @default.
- W2070955242 cites W2004178010 @default.
- W2070955242 cites W2035520059 @default.
- W2070955242 cites W2041570032 @default.
- W2070955242 cites W2056636058 @default.
- W2070955242 cites W2074845186 @default.
- W2070955242 cites W2084612960 @default.
- W2070955242 cites W2088009928 @default.
- W2070955242 cites W2103144422 @default.
- W2070955242 cites W2104212315 @default.
- W2070955242 cites W2111493415 @default.
- W2070955242 cites W2112456858 @default.
- W2070955242 cites W2128986492 @default.
- W2070955242 cites W2165381625 @default.
- W2070955242 cites W1990207942 @default.
- W2070955242 doi "https://doi.org/10.1109/rcslplt.2010.5615265" @default.
- W2070955242 hasPublicationYear "2010" @default.
- W2070955242 type Work @default.
- W2070955242 sameAs 2070955242 @default.
- W2070955242 citedByCount "0" @default.
- W2070955242 crossrefType "proceedings-article" @default.
- W2070955242 hasAuthorship W2070955242A5015195367 @default.
- W2070955242 hasAuthorship W2070955242A5052084331 @default.
- W2070955242 hasAuthorship W2070955242A5054217340 @default.
- W2070955242 hasAuthorship W2070955242A5066605155 @default.
- W2070955242 hasAuthorship W2070955242A5067366339 @default.
- W2070955242 hasAuthorship W2070955242A5070546385 @default.
- W2070955242 hasConcept C120665830 @default.
- W2070955242 hasConcept C121332964 @default.
- W2070955242 hasConcept C1276947 @default.
- W2070955242 hasConcept C146024833 @default.
- W2070955242 hasConcept C165801399 @default.
- W2070955242 hasConcept C184779094 @default.
- W2070955242 hasConcept C185544564 @default.
- W2070955242 hasConcept C192562407 @default.
- W2070955242 hasConcept C2776798109 @default.
- W2070955242 hasConcept C2993559815 @default.
- W2070955242 hasConcept C4839761 @default.
- W2070955242 hasConcept C49040817 @default.
- W2070955242 hasConcept C520434653 @default.
- W2070955242 hasConcept C548442186 @default.
- W2070955242 hasConcept C62520636 @default.
- W2070955242 hasConcept C82706917 @default.
- W2070955242 hasConceptScore W2070955242C120665830 @default.
- W2070955242 hasConceptScore W2070955242C121332964 @default.
- W2070955242 hasConceptScore W2070955242C1276947 @default.
- W2070955242 hasConceptScore W2070955242C146024833 @default.
- W2070955242 hasConceptScore W2070955242C165801399 @default.
- W2070955242 hasConceptScore W2070955242C184779094 @default.
- W2070955242 hasConceptScore W2070955242C185544564 @default.
- W2070955242 hasConceptScore W2070955242C192562407 @default.
- W2070955242 hasConceptScore W2070955242C2776798109 @default.
- W2070955242 hasConceptScore W2070955242C2993559815 @default.
- W2070955242 hasConceptScore W2070955242C4839761 @default.
- W2070955242 hasConceptScore W2070955242C49040817 @default.
- W2070955242 hasConceptScore W2070955242C520434653 @default.
- W2070955242 hasConceptScore W2070955242C548442186 @default.
- W2070955242 hasConceptScore W2070955242C62520636 @default.
- W2070955242 hasConceptScore W2070955242C82706917 @default.
- W2070955242 hasLocation W20709552421 @default.
- W2070955242 hasOpenAccess W2070955242 @default.
- W2070955242 hasPrimaryLocation W20709552421 @default.
- W2070955242 hasRelatedWork W1966695036 @default.
- W2070955242 hasRelatedWork W1987102771 @default.
- W2070955242 hasRelatedWork W2024541485 @default.
- W2070955242 hasRelatedWork W2028984193 @default.
- W2070955242 hasRelatedWork W2064912619 @default.
- W2070955242 hasRelatedWork W2070955242 @default.
- W2070955242 hasRelatedWork W2103144422 @default.
- W2070955242 hasRelatedWork W2327673780 @default.
- W2070955242 hasRelatedWork W2352402305 @default.
- W2070955242 hasRelatedWork W2982468954 @default.
- W2070955242 isParatext "false" @default.
- W2070955242 isRetracted "false" @default.
- W2070955242 magId "2070955242" @default.
- W2070955242 workType "article" @default.