Matches in SemOpenAlex for { <https://semopenalex.org/work/W2070985972> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2070985972 endingPage "96" @default.
- W2070985972 startingPage "89" @default.
- W2070985972 abstract "A series of two-step pulsed-DC reactive sputtering methods were employed to explore the feasibility of making fully (0002)-textured AlN thin films with a better control of its film quality. By varying the process parameters, e.g., working pressure, discharge power, and reactive atmosphere, of the first-step sputtering, while those of the second-step sputtering kept constant, we observed that the full width at half maximum of AlN (0002) rocking curve became smaller than that of the corresponding one-step sputtering on Si. The residual stress in two-step working pressure method on Si also became smaller in magnitude and varied less with pressure compared to that of its corresponding one-step counterpart. These phenomena were rationalized in terms of film thickness effects and deposition mechanisms. For deposition on Mo, on the other hand, the quality of the AlN piezoelectric film is found to be totally decided by the underlying Mo film, regardless of the sputtering parameters for AlN deposition including wo..." @default.
- W2070985972 created "2016-06-24" @default.
- W2070985972 creator A5005613366 @default.
- W2070985972 creator A5033941528 @default.
- W2070985972 creator A5048854465 @default.
- W2070985972 date "2009-06-30" @default.
- W2070985972 modified "2023-09-24" @default.
- W2070985972 title "Two-Step Reactive Sputtering of Piezoelectric AIN Thin Films on Mo Electrodes for FBAR Applications" @default.
- W2070985972 cites W1964753392 @default.
- W2070985972 cites W1969134457 @default.
- W2070985972 cites W1969378772 @default.
- W2070985972 cites W1985826406 @default.
- W2070985972 cites W1987528942 @default.
- W2070985972 cites W1997184994 @default.
- W2070985972 cites W2000953643 @default.
- W2070985972 cites W2010391598 @default.
- W2070985972 cites W2017048033 @default.
- W2070985972 cites W2031733045 @default.
- W2070985972 cites W2041690766 @default.
- W2070985972 cites W2043237080 @default.
- W2070985972 cites W2043313417 @default.
- W2070985972 cites W2050890807 @default.
- W2070985972 cites W2057242677 @default.
- W2070985972 cites W2061375278 @default.
- W2070985972 cites W2089804725 @default.
- W2070985972 cites W2153791536 @default.
- W2070985972 doi "https://doi.org/10.1080/00150190902873261" @default.
- W2070985972 hasPublicationYear "2009" @default.
- W2070985972 type Work @default.
- W2070985972 sameAs 2070985972 @default.
- W2070985972 citedByCount "2" @default.
- W2070985972 countsByYear W20709859722013 @default.
- W2070985972 countsByYear W20709859722017 @default.
- W2070985972 crossrefType "journal-article" @default.
- W2070985972 hasAuthorship W2070985972A5005613366 @default.
- W2070985972 hasAuthorship W2070985972A5033941528 @default.
- W2070985972 hasAuthorship W2070985972A5048854465 @default.
- W2070985972 hasConcept C100082104 @default.
- W2070985972 hasConcept C147789679 @default.
- W2070985972 hasConcept C159985019 @default.
- W2070985972 hasConcept C171250308 @default.
- W2070985972 hasConcept C17525397 @default.
- W2070985972 hasConcept C185592680 @default.
- W2070985972 hasConcept C19067145 @default.
- W2070985972 hasConcept C192562407 @default.
- W2070985972 hasConcept C22423302 @default.
- W2070985972 hasConcept C49040817 @default.
- W2070985972 hasConceptScore W2070985972C100082104 @default.
- W2070985972 hasConceptScore W2070985972C147789679 @default.
- W2070985972 hasConceptScore W2070985972C159985019 @default.
- W2070985972 hasConceptScore W2070985972C171250308 @default.
- W2070985972 hasConceptScore W2070985972C17525397 @default.
- W2070985972 hasConceptScore W2070985972C185592680 @default.
- W2070985972 hasConceptScore W2070985972C19067145 @default.
- W2070985972 hasConceptScore W2070985972C192562407 @default.
- W2070985972 hasConceptScore W2070985972C22423302 @default.
- W2070985972 hasConceptScore W2070985972C49040817 @default.
- W2070985972 hasIssue "1" @default.
- W2070985972 hasLocation W20709859721 @default.
- W2070985972 hasOpenAccess W2070985972 @default.
- W2070985972 hasPrimaryLocation W20709859721 @default.
- W2070985972 hasRelatedWork W2016244076 @default.
- W2070985972 hasRelatedWork W2021714583 @default.
- W2070985972 hasRelatedWork W2053499506 @default.
- W2070985972 hasRelatedWork W2073072988 @default.
- W2070985972 hasRelatedWork W2093279597 @default.
- W2070985972 hasRelatedWork W2206351746 @default.
- W2070985972 hasRelatedWork W2281145519 @default.
- W2070985972 hasRelatedWork W2374997983 @default.
- W2070985972 hasRelatedWork W2383379936 @default.
- W2070985972 hasRelatedWork W2763489966 @default.
- W2070985972 hasVolume "380" @default.
- W2070985972 isParatext "false" @default.
- W2070985972 isRetracted "false" @default.
- W2070985972 magId "2070985972" @default.
- W2070985972 workType "article" @default.