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- W2071094668 abstract "The surface of L‐leucine films irradiated with an Ar5000 cluster ion beam (5 keV) was characterized by using the X‐ray reflective (XRR) measurement method, atomic force microscopy (AFM) and ellipsometry. No significant damage was detected on the surface of the L‐leucine films irradiated with the Ar cluster ion beam. Therefore, the large cluster‐low‐energy (about 1 eV/atom) beam would be suitable for low‐damage etching of organic materials." @default.
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- W2071094668 date "2011-01-01" @default.
- W2071094668 modified "2023-09-23" @default.
- W2071094668 title "Evaluation of Surface Damage of Organic Films due to Irradiation with Energetic Ion Beams" @default.
- W2071094668 doi "https://doi.org/10.1063/1.3548390" @default.
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