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- W2071122615 endingPage "2365" @default.
- W2071122615 startingPage "2345" @default.
- W2071122615 abstract "Based on statistics theory and contact theory, a material removal model for predicting polishing quality in chemical-mechanical polishing (CMP) of multi-material surface is developed. The contacts of pad-workpiece and pad-particle-workpiece are characterized by the elastic–plastic contact mechanism. The material removal is considered to be the sum of the contributions from two movement modes of particles. Within the model, linear material removal volume ( LMRV ) can be determined as a function of the interactions of workpiece, pad and slurry. The model also determines the relationship between LMRV and roughness. It is found that polishing pad and parameters of polishing conditions have significant effects on the polishing quality. The experimental results show that chemical reagents contribute quite differently to multi-material end-face planarization. The proposed model reveals insights into improvement of the polishing quality of multi-material surface such as fiber array end-face." @default.
- W2071122615 created "2016-06-24" @default.
- W2071122615 creator A5018153962 @default.
- W2071122615 creator A5028429151 @default.
- W2071122615 creator A5054986980 @default.
- W2071122615 date "2014-06-01" @default.
- W2071122615 modified "2023-10-14" @default.
- W2071122615 title "Material Removal Model and Experimental Analysis in the CMP of Si-Based Fiber Array" @default.
- W2071122615 cites W1982650395 @default.
- W2071122615 cites W1991571010 @default.
- W2071122615 cites W2013545035 @default.
- W2071122615 cites W2042531774 @default.
- W2071122615 cites W20513483 @default.
- W2071122615 cites W2062939695 @default.
- W2071122615 cites W2086483556 @default.
- W2071122615 cites W2086933933 @default.
- W2071122615 cites W2103239205 @default.
- W2071122615 cites W2103592548 @default.
- W2071122615 cites W2108861471 @default.
- W2071122615 cites W2126212041 @default.
- W2071122615 cites W2127767984 @default.
- W2071122615 cites W2129492640 @default.
- W2071122615 cites W2155260474 @default.
- W2071122615 cites W2172818226 @default.
- W2071122615 cites W2325312583 @default.
- W2071122615 cites W2543884119 @default.
- W2071122615 doi "https://doi.org/10.4028/www.scientific.net/amr.941-944.2345" @default.
- W2071122615 hasPublicationYear "2014" @default.
- W2071122615 type Work @default.
- W2071122615 sameAs 2071122615 @default.
- W2071122615 citedByCount "5" @default.
- W2071122615 countsByYear W20711226152017 @default.
- W2071122615 countsByYear W20711226152018 @default.
- W2071122615 countsByYear W20711226152019 @default.
- W2071122615 countsByYear W20711226152022 @default.
- W2071122615 crossrefType "journal-article" @default.
- W2071122615 hasAuthorship W2071122615A5018153962 @default.
- W2071122615 hasAuthorship W2071122615A5028429151 @default.
- W2071122615 hasAuthorship W2071122615A5054986980 @default.
- W2071122615 hasConcept C107365816 @default.
- W2071122615 hasConcept C111368507 @default.
- W2071122615 hasConcept C127313418 @default.
- W2071122615 hasConcept C127413603 @default.
- W2071122615 hasConcept C138113353 @default.
- W2071122615 hasConcept C159985019 @default.
- W2071122615 hasConcept C180088628 @default.
- W2071122615 hasConcept C192562407 @default.
- W2071122615 hasConcept C199639397 @default.
- W2071122615 hasConcept C2778517922 @default.
- W2071122615 hasConcept C519885992 @default.
- W2071122615 hasConcept C94293008 @default.
- W2071122615 hasConceptScore W2071122615C107365816 @default.
- W2071122615 hasConceptScore W2071122615C111368507 @default.
- W2071122615 hasConceptScore W2071122615C127313418 @default.
- W2071122615 hasConceptScore W2071122615C127413603 @default.
- W2071122615 hasConceptScore W2071122615C138113353 @default.
- W2071122615 hasConceptScore W2071122615C159985019 @default.
- W2071122615 hasConceptScore W2071122615C180088628 @default.
- W2071122615 hasConceptScore W2071122615C192562407 @default.
- W2071122615 hasConceptScore W2071122615C199639397 @default.
- W2071122615 hasConceptScore W2071122615C2778517922 @default.
- W2071122615 hasConceptScore W2071122615C519885992 @default.
- W2071122615 hasConceptScore W2071122615C94293008 @default.
- W2071122615 hasLocation W20711226151 @default.
- W2071122615 hasOpenAccess W2071122615 @default.
- W2071122615 hasPrimaryLocation W20711226151 @default.
- W2071122615 hasRelatedWork W1570186419 @default.
- W2071122615 hasRelatedWork W1974780122 @default.
- W2071122615 hasRelatedWork W2014627130 @default.
- W2071122615 hasRelatedWork W2047349890 @default.
- W2071122615 hasRelatedWork W2250406472 @default.
- W2071122615 hasRelatedWork W2261892685 @default.
- W2071122615 hasRelatedWork W2350419210 @default.
- W2071122615 hasRelatedWork W2356978086 @default.
- W2071122615 hasRelatedWork W2364203019 @default.
- W2071122615 hasRelatedWork W3048737581 @default.
- W2071122615 hasVolume "941-944" @default.
- W2071122615 isParatext "false" @default.
- W2071122615 isRetracted "false" @default.
- W2071122615 magId "2071122615" @default.
- W2071122615 workType "article" @default.