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- W2071125088 endingPage "1912" @default.
- W2071125088 startingPage "1909" @default.
- W2071125088 abstract "Dynamic response time is an important performance parameter for capacitive RF-MEMS switch. This paper establishes a differential equation, in order to analyse the influencing factors of dynamic response time. The simulation results show that pulling-down time can reach 7.5μs when beam length equals to 200μm, beam width equals to 30μm, beam thickness equals to 1μm, beam material adopts Al and dielectric layer selects Si 3 N 4 ." @default.
- W2071125088 created "2016-06-24" @default.
- W2071125088 creator A5050748517 @default.
- W2071125088 creator A5078428743 @default.
- W2071125088 date "2013-09-01" @default.
- W2071125088 modified "2023-09-25" @default.
- W2071125088 title "Research on the Dynamic Response of Capacitive RF-MEMS Switch" @default.
- W2071125088 cites W2020457891 @default.
- W2071125088 cites W2030847728 @default.
- W2071125088 cites W4248458572 @default.
- W2071125088 doi "https://doi.org/10.4028/www.scientific.net/amr.791-793.1909" @default.
- W2071125088 hasPublicationYear "2013" @default.
- W2071125088 type Work @default.
- W2071125088 sameAs 2071125088 @default.
- W2071125088 citedByCount "1" @default.
- W2071125088 countsByYear W20711250882014 @default.
- W2071125088 crossrefType "journal-article" @default.
- W2071125088 hasAuthorship W2071125088A5050748517 @default.
- W2071125088 hasAuthorship W2071125088A5078428743 @default.
- W2071125088 hasConcept C119599485 @default.
- W2071125088 hasConcept C120665830 @default.
- W2071125088 hasConcept C121332964 @default.
- W2071125088 hasConcept C121684516 @default.
- W2071125088 hasConcept C127413603 @default.
- W2071125088 hasConcept C168834538 @default.
- W2071125088 hasConcept C19012869 @default.
- W2071125088 hasConcept C192562407 @default.
- W2071125088 hasConcept C206755178 @default.
- W2071125088 hasConcept C37977207 @default.
- W2071125088 hasConcept C41008148 @default.
- W2071125088 hasConcept C49040817 @default.
- W2071125088 hasConceptScore W2071125088C119599485 @default.
- W2071125088 hasConceptScore W2071125088C120665830 @default.
- W2071125088 hasConceptScore W2071125088C121332964 @default.
- W2071125088 hasConceptScore W2071125088C121684516 @default.
- W2071125088 hasConceptScore W2071125088C127413603 @default.
- W2071125088 hasConceptScore W2071125088C168834538 @default.
- W2071125088 hasConceptScore W2071125088C19012869 @default.
- W2071125088 hasConceptScore W2071125088C192562407 @default.
- W2071125088 hasConceptScore W2071125088C206755178 @default.
- W2071125088 hasConceptScore W2071125088C37977207 @default.
- W2071125088 hasConceptScore W2071125088C41008148 @default.
- W2071125088 hasConceptScore W2071125088C49040817 @default.
- W2071125088 hasLocation W20711250881 @default.
- W2071125088 hasOpenAccess W2071125088 @default.
- W2071125088 hasPrimaryLocation W20711250881 @default.
- W2071125088 hasRelatedWork W2048778831 @default.
- W2071125088 hasRelatedWork W2071125088 @default.
- W2071125088 hasRelatedWork W2102625889 @default.
- W2071125088 hasRelatedWork W2107453856 @default.
- W2071125088 hasRelatedWork W2120568191 @default.
- W2071125088 hasRelatedWork W2156576069 @default.
- W2071125088 hasRelatedWork W2184007377 @default.
- W2071125088 hasRelatedWork W2546695492 @default.
- W2071125088 hasRelatedWork W2593316974 @default.
- W2071125088 hasRelatedWork W4251646950 @default.
- W2071125088 hasVolume "791-793" @default.
- W2071125088 isParatext "false" @default.
- W2071125088 isRetracted "false" @default.
- W2071125088 magId "2071125088" @default.
- W2071125088 workType "article" @default.