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- W2071171635 abstract "Abstract To explore the possibilities of double layer PMMA resists systems the development rates have been measured for five commercially available PMMA's in six diferent developers. The results show that the PMMA's can be divided into two groups with different development rates independent of developer. The choice of resists for an optimal double layer is therefore straightforward. The obtined data for the development rate were used as input for a simulation of resist profiles in a particular double layer PMMA system using a string model. For resist layers with a total thickness larger than ∼500 nm the results agree rather well with experimental profiles. To assess the possibilities of other PMMA's the molecular weights and their distributions of eleven commercial PMMA's have been measured by gel permeation chromatography." @default.
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- W2071171635 date "1990-04-01" @default.
- W2071171635 modified "2023-09-27" @default.
- W2071171635 title "On double layer PMMA resist systems: Development rates and molecular weight distributions of commercial PMMA resists" @default.
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- W2071171635 doi "https://doi.org/10.1016/0167-9317(90)90171-o" @default.
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