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• W2071302079 abstract "The neutral gas temperature of fluorocarbon plasmas in a remote toroidal transformer-coupled source was measured to be greater than 5000K, under the conditions of a power density greater than 15W∕cm3 and pressures above 2torr. The rovibrational bands of C2 molecules (swan bands, dΠg3→aΠu3) were fitted to obtain the rotational temperature that was assumed to equal the translational temperature. This rotational-translational temperature equilibrium assumption was supported by the comparison with the rotational temperature of second positive system of added N2. For the same gas mixture, the neutral gas temperature is nearly a linear function of plasma power, since the conduction to chamber wall and convection are the major energy-loss processes, and they are both proportional to neutral gas temperature. The dependence of the neutral gas temperature on O2 flow rate and pressure can be well represented through the power dependence, under the condition of constant current operation. An Arrhenius type of dependence between the etching rate of oxide film and the neutral gas temperature is observed, maybe indicating the importance of the pyrolytic dissociation in the plasma formation process when the temperature is above 5000K." @default.
• W2071302079 created "2016-06-24" @default.
• W2071302079 creator A5021901576 @default.
• W2071302079 creator A5060373227 @default.
• W2071302079 creator A5070999670 @default.
• W2071302079 date "2006-01-01" @default.
• W2071302079 modified "2023-10-16" @default.
• W2071302079 title "Neutral gas temperature measurements of high-power-density fluorocarbon plasmas by fitting swan bands of C2 molecules" @default.
• W2071302079 cites W11039 @default.
• W2071302079 cites W1504344856 @default.
• W2071302079 cites W1592215427 @default.
• W2071302079 cites W1610574370 @default.
• W2071302079 cites W1965057129 @default.
• W2071302079 cites W1968403604 @default.
• W2071302079 cites W1989033083 @default.
• W2071302079 cites W1996147018 @default.
• W2071302079 cites W2001393400 @default.
• W2071302079 cites W2010291286 @default.
• W2071302079 cites W2020299789 @default.
• W2071302079 cites W2022502870 @default.
• W2071302079 cites W2029614243 @default.
• W2071302079 cites W2034680614 @default.
• W2071302079 cites W2039068553 @default.
• W2071302079 cites W2041133286 @default.
• W2071302079 cites W2051177279 @default.
• W2071302079 cites W2052810028 @default.
• W2071302079 cites W2056539372 @default.
• W2071302079 cites W2064431641 @default.
• W2071302079 cites W2070491991 @default.
• W2071302079 cites W2070819070 @default.
• W2071302079 cites W2073204127 @default.
• W2071302079 cites W2097362677 @default.
• W2071302079 cites W2121240530 @default.
• W2071302079 cites W2123235116 @default.
• W2071302079 doi "https://doi.org/10.1063/1.2159545" @default.
• W2071302079 hasPublicationYear "2006" @default.
• W2071302079 type Work @default.
• W2071302079 sameAs 2071302079 @default.
• W2071302079 citedByCount "38" @default.
• W2071302079 countsByYear W20713020792012 @default.
• W2071302079 countsByYear W20713020792013 @default.
• W2071302079 countsByYear W20713020792014 @default.
• W2071302079 countsByYear W20713020792015 @default.
• W2071302079 countsByYear W20713020792016 @default.
• W2071302079 countsByYear W20713020792017 @default.
• W2071302079 countsByYear W20713020792018 @default.
• W2071302079 countsByYear W20713020792019 @default.
• W2071302079 countsByYear W20713020792020 @default.
• W2071302079 countsByYear W20713020792021 @default.
• W2071302079 countsByYear W20713020792022 @default.
• W2071302079 countsByYear W20713020792023 @default.
• W2071302079 crossrefType "journal-article" @default.
• W2071302079 hasAuthorship W2071302079A5021901576 @default.
• W2071302079 hasAuthorship W2071302079A5060373227 @default.
• W2071302079 hasAuthorship W2071302079A5070999670 @default.
• W2071302079 hasConcept C102931765 @default.
• W2071302079 hasConcept C113196181 @default.
• W2071302079 hasConcept C121332964 @default.
• W2071302079 hasConcept C125485243 @default.
• W2071302079 hasConcept C145148216 @default.
• W2071302079 hasConcept C147789679 @default.
• W2071302079 hasConcept C15744967 @default.
• W2071302079 hasConcept C167812310 @default.
• W2071302079 hasConcept C16951817 @default.
• W2071302079 hasConcept C178790620 @default.
• W2071302079 hasConcept C184779094 @default.
• W2071302079 hasConcept C185592680 @default.
• W2071302079 hasConcept C22175881 @default.
• W2071302079 hasConcept C2776875633 @default.
• W2071302079 hasConcept C32909587 @default.
• W2071302079 hasConcept C43503373 @default.
• W2071302079 hasConcept C43617362 @default.
• W2071302079 hasConcept C542102704 @default.
• W2071302079 hasConcept C58437636 @default.
• W2071302079 hasConcept C62520636 @default.
• W2071302079 hasConcept C82706917 @default.
• W2071302079 hasConcept C92195417 @default.
• W2071302079 hasConceptScore W2071302079C102931765 @default.
• W2071302079 hasConceptScore W2071302079C113196181 @default.
• W2071302079 hasConceptScore W2071302079C121332964 @default.
• W2071302079 hasConceptScore W2071302079C125485243 @default.
• W2071302079 hasConceptScore W2071302079C145148216 @default.
• W2071302079 hasConceptScore W2071302079C147789679 @default.
• W2071302079 hasConceptScore W2071302079C15744967 @default.
• W2071302079 hasConceptScore W2071302079C167812310 @default.
• W2071302079 hasConceptScore W2071302079C16951817 @default.
• W2071302079 hasConceptScore W2071302079C178790620 @default.
• W2071302079 hasConceptScore W2071302079C184779094 @default.
• W2071302079 hasConceptScore W2071302079C185592680 @default.
• W2071302079 hasConceptScore W2071302079C22175881 @default.
• W2071302079 hasConceptScore W2071302079C2776875633 @default.
• W2071302079 hasConceptScore W2071302079C32909587 @default.
• W2071302079 hasConceptScore W2071302079C43503373 @default.
• W2071302079 hasConceptScore W2071302079C43617362 @default.
• W2071302079 hasConceptScore W2071302079C542102704 @default.
• W2071302079 hasConceptScore W2071302079C58437636 @default.
• W2071302079 hasConceptScore W2071302079C62520636 @default.
• W2071302079 hasConceptScore W2071302079C82706917 @default.
• W2071302079 hasConceptScore W2071302079C92195417 @default.
• W2071302079 hasIssue "1" @default.

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