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- W2071329423 abstract "We have developed a KrF excimer laser with ultra narrow linewidth and high repetition rate applicable for optical lithography using DUV wafer scanners with highest numerical aperture (NA) of more than 0.8. A laser bandwidth of less than 0.4 pm, full width half maximum, is achieved by our new design of the laser resonator, which is based on out patented polarization coupled resonator. The new resonator design increase the efficiency of ht laser optics and improves the wavelength stability. The laser tube and solid sate pulser have been adapted to the new laser resonator. As a result, another step in the reduction of the cost of operation is achieved. The laser operates with a repetition rate of 2 kHz and gives a large operation range with respect to wavelength and energy range. The characteristic performance of this new excimer laser is presented." @default.
- W2071329423 created "2016-06-24" @default.
- W2071329423 creator A5002646708 @default.
- W2071329423 creator A5004628215 @default.
- W2071329423 creator A5020753383 @default.
- W2071329423 creator A5022664950 @default.
- W2071329423 creator A5024790976 @default.
- W2071329423 creator A5075244036 @default.
- W2071329423 creator A5080438848 @default.
- W2071329423 date "2000-07-05" @default.
- W2071329423 modified "2023-09-23" @default.
- W2071329423 title "Ultranarrow-bandwidth excimer lasers for 248-nm DUV lithography" @default.
- W2071329423 doi "https://doi.org/10.1117/12.388985" @default.
- W2071329423 hasPublicationYear "2000" @default.
- W2071329423 type Work @default.
- W2071329423 sameAs 2071329423 @default.
- W2071329423 citedByCount "1" @default.
- W2071329423 crossrefType "proceedings-article" @default.
- W2071329423 hasAuthorship W2071329423A5002646708 @default.
- W2071329423 hasAuthorship W2071329423A5004628215 @default.
- W2071329423 hasAuthorship W2071329423A5020753383 @default.
- W2071329423 hasAuthorship W2071329423A5022664950 @default.
- W2071329423 hasAuthorship W2071329423A5024790976 @default.
- W2071329423 hasAuthorship W2071329423A5075244036 @default.
- W2071329423 hasAuthorship W2071329423A5080438848 @default.
- W2071329423 hasConcept C105487726 @default.
- W2071329423 hasConcept C120665830 @default.
- W2071329423 hasConcept C121332964 @default.
- W2071329423 hasConcept C142181693 @default.
- W2071329423 hasConcept C192562407 @default.
- W2071329423 hasConcept C204223013 @default.
- W2071329423 hasConcept C2780477314 @default.
- W2071329423 hasConcept C49040817 @default.
- W2071329423 hasConcept C520434653 @default.
- W2071329423 hasConcept C97126364 @default.
- W2071329423 hasConceptScore W2071329423C105487726 @default.
- W2071329423 hasConceptScore W2071329423C120665830 @default.
- W2071329423 hasConceptScore W2071329423C121332964 @default.
- W2071329423 hasConceptScore W2071329423C142181693 @default.
- W2071329423 hasConceptScore W2071329423C192562407 @default.
- W2071329423 hasConceptScore W2071329423C204223013 @default.
- W2071329423 hasConceptScore W2071329423C2780477314 @default.
- W2071329423 hasConceptScore W2071329423C49040817 @default.
- W2071329423 hasConceptScore W2071329423C520434653 @default.
- W2071329423 hasConceptScore W2071329423C97126364 @default.
- W2071329423 hasLocation W20713294231 @default.
- W2071329423 hasOpenAccess W2071329423 @default.
- W2071329423 hasPrimaryLocation W20713294231 @default.
- W2071329423 hasRelatedWork W1971432470 @default.
- W2071329423 hasRelatedWork W2035974533 @default.
- W2071329423 hasRelatedWork W2042881570 @default.
- W2071329423 hasRelatedWork W2049407516 @default.
- W2071329423 hasRelatedWork W2063782820 @default.
- W2071329423 hasRelatedWork W2070174777 @default.
- W2071329423 hasRelatedWork W2098749959 @default.
- W2071329423 hasRelatedWork W2099263797 @default.
- W2071329423 hasRelatedWork W2130498271 @default.
- W2071329423 hasRelatedWork W2466258104 @default.
- W2071329423 isParatext "false" @default.
- W2071329423 isRetracted "false" @default.
- W2071329423 magId "2071329423" @default.
- W2071329423 workType "article" @default.