Matches in SemOpenAlex for { <https://semopenalex.org/work/W2071340916> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2071340916 abstract "Abstract We report on an improved standard etching method to fabricate deep etched 〈100〉-oriented Silicon surfaces with a mirrorlike finish. It is shown that the addition of minimal quantities of an antimony or arsenic compound (in the mmol range) to a 40% wt. KOH-solution has a deep impact on the etching characteristics of single crystalline silicon. The compounds undergo reduction to the elements at the silicon surface and form covalent bonds to the substrate. As etching proceeds, a film of the elements Sb or As floats on the surface, changes the oxidation/dissolution behavior of the silicon and finally leads to surfaces with an rms roughness of below 2 nm." @default.
- W2071340916 created "2016-06-24" @default.
- W2071340916 creator A5009946730 @default.
- W2071340916 creator A5016685658 @default.
- W2071340916 creator A5072637966 @default.
- W2071340916 creator A5085812152 @default.
- W2071340916 creator A5088015605 @default.
- W2071340916 creator A5088668149 @default.
- W2071340916 date "2001-09-01" @default.
- W2071340916 modified "2023-09-27" @default.
- W2071340916 title "Improved anisotropic deep etching in KOH-solutions to fabricate highly specular surfaces" @default.
- W2071340916 cites W1967954878 @default.
- W2071340916 cites W2072166152 @default.
- W2071340916 cites W2110660134 @default.
- W2071340916 doi "https://doi.org/10.1016/s0167-9317(01)00488-9" @default.
- W2071340916 hasPublicationYear "2001" @default.
- W2071340916 type Work @default.
- W2071340916 sameAs 2071340916 @default.
- W2071340916 citedByCount "8" @default.
- W2071340916 countsByYear W20713409162013 @default.
- W2071340916 crossrefType "journal-article" @default.
- W2071340916 hasAuthorship W2071340916A5009946730 @default.
- W2071340916 hasAuthorship W2071340916A5016685658 @default.
- W2071340916 hasAuthorship W2071340916A5072637966 @default.
- W2071340916 hasAuthorship W2071340916A5085812152 @default.
- W2071340916 hasAuthorship W2071340916A5088015605 @default.
- W2071340916 hasAuthorship W2071340916A5088668149 @default.
- W2071340916 hasConcept C100460472 @default.
- W2071340916 hasConcept C107365816 @default.
- W2071340916 hasConcept C111368507 @default.
- W2071340916 hasConcept C118381688 @default.
- W2071340916 hasConcept C120665830 @default.
- W2071340916 hasConcept C121332964 @default.
- W2071340916 hasConcept C127313418 @default.
- W2071340916 hasConcept C127413603 @default.
- W2071340916 hasConcept C159985019 @default.
- W2071340916 hasConcept C160671074 @default.
- W2071340916 hasConcept C171250308 @default.
- W2071340916 hasConcept C191897082 @default.
- W2071340916 hasConcept C192562407 @default.
- W2071340916 hasConcept C2777289219 @default.
- W2071340916 hasConcept C2779227376 @default.
- W2071340916 hasConcept C42360764 @default.
- W2071340916 hasConcept C49040817 @default.
- W2071340916 hasConcept C541565711 @default.
- W2071340916 hasConcept C544956773 @default.
- W2071340916 hasConcept C71039073 @default.
- W2071340916 hasConcept C88380143 @default.
- W2071340916 hasConceptScore W2071340916C100460472 @default.
- W2071340916 hasConceptScore W2071340916C107365816 @default.
- W2071340916 hasConceptScore W2071340916C111368507 @default.
- W2071340916 hasConceptScore W2071340916C118381688 @default.
- W2071340916 hasConceptScore W2071340916C120665830 @default.
- W2071340916 hasConceptScore W2071340916C121332964 @default.
- W2071340916 hasConceptScore W2071340916C127313418 @default.
- W2071340916 hasConceptScore W2071340916C127413603 @default.
- W2071340916 hasConceptScore W2071340916C159985019 @default.
- W2071340916 hasConceptScore W2071340916C160671074 @default.
- W2071340916 hasConceptScore W2071340916C171250308 @default.
- W2071340916 hasConceptScore W2071340916C191897082 @default.
- W2071340916 hasConceptScore W2071340916C192562407 @default.
- W2071340916 hasConceptScore W2071340916C2777289219 @default.
- W2071340916 hasConceptScore W2071340916C2779227376 @default.
- W2071340916 hasConceptScore W2071340916C42360764 @default.
- W2071340916 hasConceptScore W2071340916C49040817 @default.
- W2071340916 hasConceptScore W2071340916C541565711 @default.
- W2071340916 hasConceptScore W2071340916C544956773 @default.
- W2071340916 hasConceptScore W2071340916C71039073 @default.
- W2071340916 hasConceptScore W2071340916C88380143 @default.
- W2071340916 hasLocation W20713409161 @default.
- W2071340916 hasOpenAccess W2071340916 @default.
- W2071340916 hasPrimaryLocation W20713409161 @default.
- W2071340916 hasRelatedWork W1966201868 @default.
- W2071340916 hasRelatedWork W1975424700 @default.
- W2071340916 hasRelatedWork W2034716703 @default.
- W2071340916 hasRelatedWork W2044619291 @default.
- W2071340916 hasRelatedWork W2070736010 @default.
- W2071340916 hasRelatedWork W2125116839 @default.
- W2071340916 hasRelatedWork W2300456175 @default.
- W2071340916 hasRelatedWork W2339095656 @default.
- W2071340916 hasRelatedWork W2501630368 @default.
- W2071340916 hasRelatedWork W2780374385 @default.
- W2071340916 hasRelatedWork W2903101056 @default.
- W2071340916 hasRelatedWork W2953909963 @default.
- W2071340916 hasRelatedWork W3003967415 @default.
- W2071340916 hasRelatedWork W3121723869 @default.
- W2071340916 hasRelatedWork W2429889728 @default.
- W2071340916 hasRelatedWork W3100225657 @default.
- W2071340916 hasRelatedWork W3107199301 @default.
- W2071340916 hasRelatedWork W3148117347 @default.
- W2071340916 hasRelatedWork W3148438141 @default.
- W2071340916 hasRelatedWork W958984663 @default.
- W2071340916 isParatext "false" @default.
- W2071340916 isRetracted "false" @default.
- W2071340916 magId "2071340916" @default.
- W2071340916 workType "article" @default.