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• W2071374323 endingPage "186" @default.
• W2071374323 startingPage "180" @default.
• W2071374323 abstract "Electromigration effects in interconnect metallizations cause a need for materials with superior resistance against electromigration failure but with adequate electrical properties. In principle, Cu(Ag) alloys are potential candidates to become an interconnect material of the next generation of microelectronic devices. Therefore, in the following paper the electroplating of such Cu(Ag) alloys from a sulfuric acid electrolyte solution with varying silver content in a home built deposition tool is presented. Besides the general deposition characteristics, the growth mode of the films and the deposition into trenches will be discussed. The investigations show that Cu(Ag) alloys can be deposited with adequate homogeneity of the film thickness by electroplating. Furthermore, the electrical resistivity is low enough to assure a use of these films for interconnect applications. However, distinct island growth and insufficient trench filling capabilities lead to the fact that the additive composition needs to be optimized for Cu(Ag) thin film electroplating." @default.
• W2071374323 created "2016-06-24" @default.
• W2071374323 creator A5005358589 @default.
• W2071374323 creator A5024058674 @default.
• W2071374323 creator A5062303592 @default.
• W2071374323 creator A5066538752 @default.
• W2071374323 date "2010-02-01" @default.
• W2071374323 modified "2023-09-23" @default.
• W2071374323 title "Electroplating of Cu(Ag) thin films for interconnect applications" @default.
• W2071374323 cites W1972302286 @default.
• W2071374323 cites W1977713871 @default.
• W2071374323 cites W1981085974 @default.
• W2071374323 cites W1986932469 @default.
• W2071374323 cites W1993313920 @default.
• W2071374323 cites W1997511516 @default.
• W2071374323 cites W2011858709 @default.
• W2071374323 cites W2012607516 @default.
• W2071374323 cites W2013779936 @default.
• W2071374323 cites W2016907622 @default.
• W2071374323 cites W2024457293 @default.
• W2071374323 cites W2051448473 @default.
• W2071374323 cites W2061116153 @default.
• W2071374323 cites W2069377610 @default.
• W2071374323 cites W2069399114 @default.
• W2071374323 cites W2073439750 @default.
• W2071374323 cites W2078598526 @default.
• W2071374323 cites W2105299086 @default.
• W2071374323 cites W2164472937 @default.
• W2071374323 cites W2166999056 @default.
• W2071374323 cites W2609724571 @default.
• W2071374323 cites W4251403856 @default.
• W2071374323 cites W2048575957 @default.
• W2071374323 doi "https://doi.org/10.1016/j.mee.2009.07.010" @default.
• W2071374323 hasPublicationYear "2010" @default.
• W2071374323 type Work @default.
• W2071374323 sameAs 2071374323 @default.
• W2071374323 citedByCount "25" @default.
• W2071374323 countsByYear W20713743232012 @default.
• W2071374323 countsByYear W20713743232013 @default.
• W2071374323 countsByYear W20713743232014 @default.
• W2071374323 countsByYear W20713743232015 @default.
• W2071374323 countsByYear W20713743232017 @default.
• W2071374323 countsByYear W20713743232018 @default.
• W2071374323 countsByYear W20713743232019 @default.
• W2071374323 countsByYear W20713743232020 @default.
• W2071374323 countsByYear W20713743232021 @default.
• W2071374323 countsByYear W20713743232022 @default.
• W2071374323 countsByYear W20713743232023 @default.
• W2071374323 crossrefType "journal-article" @default.
• W2071374323 hasAuthorship W2071374323A5005358589 @default.
• W2071374323 hasAuthorship W2071374323A5024058674 @default.
• W2071374323 hasAuthorship W2071374323A5062303592 @default.
• W2071374323 hasAuthorship W2071374323A5066538752 @default.
• W2071374323 hasConcept C123745756 @default.
• W2071374323 hasConcept C138055206 @default.
• W2071374323 hasConcept C151730666 @default.
• W2071374323 hasConcept C155310634 @default.
• W2071374323 hasConcept C159985019 @default.
• W2071374323 hasConcept C171250308 @default.
• W2071374323 hasConcept C187937830 @default.
• W2071374323 hasConcept C19067145 @default.
• W2071374323 hasConcept C191897082 @default.
• W2071374323 hasConcept C192562407 @default.
• W2071374323 hasConcept C2779227376 @default.
• W2071374323 hasConcept C2816523 @default.
• W2071374323 hasConcept C31258907 @default.
• W2071374323 hasConcept C41008148 @default.
• W2071374323 hasConcept C49040817 @default.
• W2071374323 hasConcept C51807945 @default.
• W2071374323 hasConcept C544778455 @default.
• W2071374323 hasConcept C64297162 @default.
• W2071374323 hasConcept C86803240 @default.
• W2071374323 hasConceptScore W2071374323C123745756 @default.
• W2071374323 hasConceptScore W2071374323C138055206 @default.
• W2071374323 hasConceptScore W2071374323C151730666 @default.
• W2071374323 hasConceptScore W2071374323C155310634 @default.
• W2071374323 hasConceptScore W2071374323C159985019 @default.
• W2071374323 hasConceptScore W2071374323C171250308 @default.
• W2071374323 hasConceptScore W2071374323C187937830 @default.
• W2071374323 hasConceptScore W2071374323C19067145 @default.
• W2071374323 hasConceptScore W2071374323C191897082 @default.
• W2071374323 hasConceptScore W2071374323C192562407 @default.
• W2071374323 hasConceptScore W2071374323C2779227376 @default.
• W2071374323 hasConceptScore W2071374323C2816523 @default.
• W2071374323 hasConceptScore W2071374323C31258907 @default.
• W2071374323 hasConceptScore W2071374323C41008148 @default.
• W2071374323 hasConceptScore W2071374323C49040817 @default.
• W2071374323 hasConceptScore W2071374323C51807945 @default.
• W2071374323 hasConceptScore W2071374323C544778455 @default.
• W2071374323 hasConceptScore W2071374323C64297162 @default.
• W2071374323 hasConceptScore W2071374323C86803240 @default.
• W2071374323 hasIssue "2" @default.
• W2071374323 hasLocation W20713743231 @default.
• W2071374323 hasOpenAccess W2071374323 @default.
• W2071374323 hasPrimaryLocation W20713743231 @default.
• W2071374323 hasRelatedWork W1981227509 @default.
• W2071374323 hasRelatedWork W1997382113 @default.
• W2071374323 hasRelatedWork W2071374323 @default.

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