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- W2071402106 abstract "It has been shown that single-phase α-Ta, β-Ta, Ta2N, TaN(f.c.c.) and Ta3N5 films can be produced by chemical vapour deposition (CVD). The structure of the microcrystalline deposits has been investigated by transmission electron microscopy. Electrical measurements reveal that the resistivities of CVD films are comparable with those of sputtered films. However, the temperature coefficient of resistivity (TCR) of β-Ta, Ta2N and TaN(f.c.c.) is positive, varying between 30 and 300ppmK. In the case of Ta3N5 the TCR is negative (α∼−40 000ppmK) and the resistivity has a value of about 6 μ cm." @default.
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- W2071402106 date "1974-11-01" @default.
- W2071402106 modified "2023-10-16" @default.
- W2071402106 title "Structural and electrical properties of Ta and Ta nitrides deposited by chemical vapour deposition" @default.
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- W2071402106 doi "https://doi.org/10.1016/0040-6090(74)90261-2" @default.
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