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- W2071490252 abstract "The three-dimensional (3D) metrology for specular reflecting surfaces attracted much attention due to their various applications in optics, electronics, or semiconductor industry. Fringe reflection technique is an effective tool to measure the specular surface slopes (gradient information), and then reconstruct the surface shape from gradient. However, most of the fringe reflection systems are built up for middle size (~10,000 mm<sup>2</sup>) or larger size (~100,000 mm<sup>2</sup>) objects by using the off-the-shelf desktop displays. In order to measure samples with smaller size (~200 mm<sub>2</sub>) with higher measuring resolution, a compact fringe reflection system is proposed. The performance of the compact specular 3D shape measurement system is demonstrated with experiments." @default.
- W2071490252 created "2016-06-24" @default.
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- W2071490252 date "2013-06-22" @default.
- W2071490252 modified "2023-09-26" @default.
- W2071490252 title "Specular 3D shape measurement with a compact fringe reflection system" @default.
- W2071490252 doi "https://doi.org/10.1117/12.2018927" @default.
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