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- W2071495884 abstract "Abstract Preliminary results of an atomic-scale simulation of the wet-etching process are reported. This model assumes an atomic-etching probability depending on the local surface configuration. The cases of flat Si(100), rough Si(100), and flat Si(111)-oriented surfaces are examined." @default.
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- W2071495884 date "1992-05-01" @default.
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- W2071495884 title "Modelling of anisotropic etching in silicon-based sensor application" @default.
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