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- W2071496743 abstract "The possibility of increasing the pulse duration of an ArF laser (wavelength 193 nm) by using an artificial forming line with nonlinear chokes is studied. An ArF laser (maximum pulse energy 15 mJ, pulse duration 18 ns, pulse repetition rate 1 KHz) with an all-solid-state pump generator is described." @default.
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- W2071496743 date "2011-04-30" @default.
- W2071496743 modified "2023-10-05" @default.
- W2071496743 title "Elongation of the pulse duration of ArF laser with a solid-state pump generator" @default.
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- W2071496743 doi "https://doi.org/10.1070/qe2011v041n04abeh014543" @default.
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