Matches in SemOpenAlex for { <https://semopenalex.org/work/W2071608908> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2071608908 endingPage "42" @default.
- W2071608908 startingPage "40" @default.
- W2071608908 abstract "Plasma etch is one of the most widely used processes in the semiconductor industry. It is used both for creating semiconductor structures and for developing photoresists. However, looking at some of the gases employed - such as CH4, CHF3, SF6, CF4, C2F6 - one finds a rather nasty list of global warming potential villains. Not only do these chemicals have “global warming potentials” thousands of times higher than carbon dioxide, they also have lifetimes of hundreds to tens of thousands of years (Figure 1, from United Nations Framework Convention on Climate Change, ghg.unfccc.int/gwp.html)." @default.
- W2071608908 created "2016-06-24" @default.
- W2071608908 creator A5058458873 @default.
- W2071608908 date "2005-04-01" @default.
- W2071608908 modified "2023-09-27" @default.
- W2071608908 title "Tackling the plasma etch villains" @default.
- W2071608908 doi "https://doi.org/10.1016/s0961-1290(05)01055-0" @default.
- W2071608908 hasPublicationYear "2005" @default.
- W2071608908 type Work @default.
- W2071608908 sameAs 2071608908 @default.
- W2071608908 citedByCount "1" @default.
- W2071608908 crossrefType "journal-article" @default.
- W2071608908 hasAuthorship W2071608908A5058458873 @default.
- W2071608908 hasConcept C108225325 @default.
- W2071608908 hasConcept C111368507 @default.
- W2071608908 hasConcept C115343472 @default.
- W2071608908 hasConcept C117671659 @default.
- W2071608908 hasConcept C119288801 @default.
- W2071608908 hasConcept C121332964 @default.
- W2071608908 hasConcept C127313418 @default.
- W2071608908 hasConcept C127413603 @default.
- W2071608908 hasConcept C132651083 @default.
- W2071608908 hasConcept C171250308 @default.
- W2071608908 hasConcept C17744445 @default.
- W2071608908 hasConcept C178790620 @default.
- W2071608908 hasConcept C185544564 @default.
- W2071608908 hasConcept C185592680 @default.
- W2071608908 hasConcept C192562407 @default.
- W2071608908 hasConcept C199539241 @default.
- W2071608908 hasConcept C2778539042 @default.
- W2071608908 hasConcept C2780608745 @default.
- W2071608908 hasConcept C2985119592 @default.
- W2071608908 hasConcept C2987888538 @default.
- W2071608908 hasConcept C39432304 @default.
- W2071608908 hasConcept C47737302 @default.
- W2071608908 hasConcept C49040817 @default.
- W2071608908 hasConcept C530467964 @default.
- W2071608908 hasConcept C61696701 @default.
- W2071608908 hasConcept C82706917 @default.
- W2071608908 hasConcept C99743013 @default.
- W2071608908 hasConceptScore W2071608908C108225325 @default.
- W2071608908 hasConceptScore W2071608908C111368507 @default.
- W2071608908 hasConceptScore W2071608908C115343472 @default.
- W2071608908 hasConceptScore W2071608908C117671659 @default.
- W2071608908 hasConceptScore W2071608908C119288801 @default.
- W2071608908 hasConceptScore W2071608908C121332964 @default.
- W2071608908 hasConceptScore W2071608908C127313418 @default.
- W2071608908 hasConceptScore W2071608908C127413603 @default.
- W2071608908 hasConceptScore W2071608908C132651083 @default.
- W2071608908 hasConceptScore W2071608908C171250308 @default.
- W2071608908 hasConceptScore W2071608908C17744445 @default.
- W2071608908 hasConceptScore W2071608908C178790620 @default.
- W2071608908 hasConceptScore W2071608908C185544564 @default.
- W2071608908 hasConceptScore W2071608908C185592680 @default.
- W2071608908 hasConceptScore W2071608908C192562407 @default.
- W2071608908 hasConceptScore W2071608908C199539241 @default.
- W2071608908 hasConceptScore W2071608908C2778539042 @default.
- W2071608908 hasConceptScore W2071608908C2780608745 @default.
- W2071608908 hasConceptScore W2071608908C2985119592 @default.
- W2071608908 hasConceptScore W2071608908C2987888538 @default.
- W2071608908 hasConceptScore W2071608908C39432304 @default.
- W2071608908 hasConceptScore W2071608908C47737302 @default.
- W2071608908 hasConceptScore W2071608908C49040817 @default.
- W2071608908 hasConceptScore W2071608908C530467964 @default.
- W2071608908 hasConceptScore W2071608908C61696701 @default.
- W2071608908 hasConceptScore W2071608908C82706917 @default.
- W2071608908 hasConceptScore W2071608908C99743013 @default.
- W2071608908 hasIssue "3" @default.
- W2071608908 hasLocation W20716089081 @default.
- W2071608908 hasOpenAccess W2071608908 @default.
- W2071608908 hasPrimaryLocation W20716089081 @default.
- W2071608908 hasRelatedWork W1150588478 @default.
- W2071608908 hasRelatedWork W2071608908 @default.
- W2071608908 hasRelatedWork W2169134068 @default.
- W2071608908 hasRelatedWork W2340219542 @default.
- W2071608908 hasRelatedWork W2600287381 @default.
- W2071608908 hasRelatedWork W2749577835 @default.
- W2071608908 hasRelatedWork W2992399575 @default.
- W2071608908 hasRelatedWork W3035452314 @default.
- W2071608908 hasRelatedWork W629042094 @default.
- W2071608908 hasRelatedWork W1009634734 @default.
- W2071608908 hasVolume "18" @default.
- W2071608908 isParatext "false" @default.
- W2071608908 isRetracted "false" @default.
- W2071608908 magId "2071608908" @default.
- W2071608908 workType "article" @default.