Matches in SemOpenAlex for { <https://semopenalex.org/work/W2071633968> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2071633968 abstract "To improve both the versatility and stability of leading edge wafer scanners, the functionality of an integrated aerial image sensor has been expanded. The system performance of current wafer scanners is a strong function of the quality of image formation of the projection lens. Current wafer scanners use aerial image sensors for best image plane calibration, illumination telecentricity calibration, coma aberration calibration, and distortion calibration. The aerial image sensor is used not only for a scanner's self-calibration but also during the projection lens manufacturing purposes. The slit-scan type aerial image sensor is used for measurement of the intensity distribution of the aerial images. This type of the image sensor can detect the intensity distribution of the aerial image from 110nm L/ S to 6micrometers L/ S. Therefore this aerial image sensor covers most aerial image measurement requirements. In this paper we will focus on the aerial image measurement for self-calibration purposes and their actual performances. We evaluate the actual performance of illumination telecentricity and coma aberration measurement. Evaluation is based upon not only measurement repeatability but also its agreement with resist image measurement results." @default.
- W2071633968 created "2016-06-24" @default.
- W2071633968 creator A5002381310 @default.
- W2071633968 creator A5003096253 @default.
- W2071633968 creator A5009000317 @default.
- W2071633968 creator A5011398531 @default.
- W2071633968 creator A5025653352 @default.
- W2071633968 creator A5040457799 @default.
- W2071633968 creator A5048640027 @default.
- W2071633968 creator A5078642206 @default.
- W2071633968 date "2002-07-15" @default.
- W2071633968 modified "2023-09-25" @default.
- W2071633968 title "Self-calibration of wafer scanners using an aerial image sensor" @default.
- W2071633968 doi "https://doi.org/10.1117/12.474637" @default.
- W2071633968 hasPublicationYear "2002" @default.
- W2071633968 type Work @default.
- W2071633968 sameAs 2071633968 @default.
- W2071633968 citedByCount "6" @default.
- W2071633968 countsByYear W20716339682014 @default.
- W2071633968 crossrefType "proceedings-article" @default.
- W2071633968 hasAuthorship W2071633968A5002381310 @default.
- W2071633968 hasAuthorship W2071633968A5003096253 @default.
- W2071633968 hasAuthorship W2071633968A5009000317 @default.
- W2071633968 hasAuthorship W2071633968A5011398531 @default.
- W2071633968 hasAuthorship W2071633968A5025653352 @default.
- W2071633968 hasAuthorship W2071633968A5040457799 @default.
- W2071633968 hasAuthorship W2071633968A5048640027 @default.
- W2071633968 hasAuthorship W2071633968A5078642206 @default.
- W2071633968 hasConcept C11413529 @default.
- W2071633968 hasConcept C115961682 @default.
- W2071633968 hasConcept C120515352 @default.
- W2071633968 hasConcept C120665830 @default.
- W2071633968 hasConcept C121332964 @default.
- W2071633968 hasConcept C126780896 @default.
- W2071633968 hasConcept C15336307 @default.
- W2071633968 hasConcept C154945302 @default.
- W2071633968 hasConcept C160633673 @default.
- W2071633968 hasConcept C160671074 @default.
- W2071633968 hasConcept C165838908 @default.
- W2071633968 hasConcept C192209626 @default.
- W2071633968 hasConcept C192562407 @default.
- W2071633968 hasConcept C194257627 @default.
- W2071633968 hasConcept C2776257435 @default.
- W2071633968 hasConcept C2776429412 @default.
- W2071633968 hasConcept C2779751349 @default.
- W2071633968 hasConcept C31258907 @default.
- W2071633968 hasConcept C31972630 @default.
- W2071633968 hasConcept C41008148 @default.
- W2071633968 hasConcept C49040817 @default.
- W2071633968 hasConcept C55020928 @default.
- W2071633968 hasConcept C57493831 @default.
- W2071633968 hasConcept C62520636 @default.
- W2071633968 hasConcept C76935873 @default.
- W2071633968 hasConceptScore W2071633968C11413529 @default.
- W2071633968 hasConceptScore W2071633968C115961682 @default.
- W2071633968 hasConceptScore W2071633968C120515352 @default.
- W2071633968 hasConceptScore W2071633968C120665830 @default.
- W2071633968 hasConceptScore W2071633968C121332964 @default.
- W2071633968 hasConceptScore W2071633968C126780896 @default.
- W2071633968 hasConceptScore W2071633968C15336307 @default.
- W2071633968 hasConceptScore W2071633968C154945302 @default.
- W2071633968 hasConceptScore W2071633968C160633673 @default.
- W2071633968 hasConceptScore W2071633968C160671074 @default.
- W2071633968 hasConceptScore W2071633968C165838908 @default.
- W2071633968 hasConceptScore W2071633968C192209626 @default.
- W2071633968 hasConceptScore W2071633968C192562407 @default.
- W2071633968 hasConceptScore W2071633968C194257627 @default.
- W2071633968 hasConceptScore W2071633968C2776257435 @default.
- W2071633968 hasConceptScore W2071633968C2776429412 @default.
- W2071633968 hasConceptScore W2071633968C2779751349 @default.
- W2071633968 hasConceptScore W2071633968C31258907 @default.
- W2071633968 hasConceptScore W2071633968C31972630 @default.
- W2071633968 hasConceptScore W2071633968C41008148 @default.
- W2071633968 hasConceptScore W2071633968C49040817 @default.
- W2071633968 hasConceptScore W2071633968C55020928 @default.
- W2071633968 hasConceptScore W2071633968C57493831 @default.
- W2071633968 hasConceptScore W2071633968C62520636 @default.
- W2071633968 hasConceptScore W2071633968C76935873 @default.
- W2071633968 hasLocation W20716339681 @default.
- W2071633968 hasOpenAccess W2071633968 @default.
- W2071633968 hasPrimaryLocation W20716339681 @default.
- W2071633968 hasRelatedWork W1974316952 @default.
- W2071633968 hasRelatedWork W2033534994 @default.
- W2071633968 hasRelatedWork W2053244475 @default.
- W2071633968 hasRelatedWork W2099428600 @default.
- W2071633968 hasRelatedWork W2139751930 @default.
- W2071633968 hasRelatedWork W2574052219 @default.
- W2071633968 hasRelatedWork W3159920843 @default.
- W2071633968 hasRelatedWork W4225259759 @default.
- W2071633968 hasRelatedWork W4281298957 @default.
- W2071633968 hasRelatedWork W2541128885 @default.
- W2071633968 isParatext "false" @default.
- W2071633968 isRetracted "false" @default.
- W2071633968 magId "2071633968" @default.
- W2071633968 workType "article" @default.