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• W207173680 abstract "This paper presents the design and characterization of linear micro motor using Micro Electro Mechanical Systems (MEMS) technology. Linear motors are needed to actuate a sub-system mechanism requiring a specific displacement. The actuation mechanism with proper control ensures accurate displacements permitting the achievement of the sub-systems desired goal and performance. For the control of the linear MEMS motor, the linear encoder that runs the entire length can be easily integrated with the component. The scaling effect from macro to micro is assessed to determine the physical dimensions of the linear MEMS motor. The gap change of a capacitor and the micro positioning of a system are typical examples using this interesting linear motor actuation mechanism. Moreover, this article evaluates different linear motor designs with surface and bulk micromachining and the proper choices of component's material with the associated challenges and manufacturing difficulties." @default.
• W207173680 created "2016-06-24" @default.
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• W207173680 date "2005-04-25" @default.
• W207173680 modified "2023-10-16" @default.
• W207173680 title "Design and characterization of a novel MEMS linear motor" @default.
• W207173680 cites W2014357611 @default.
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• W207173680 hasPublicationYear "2005" @default.
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