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• W2071769689 endingPage "24" @default.
• W2071769689 startingPage "19" @default.
• W2071769689 abstract "The available plasma chemistries for dry etching of In-containing III-V semiconductors used in long wavelength laser structures have been examined with respect to suitability for fabrication of thick photonic devices. Electron cyclotron resonance discharges of CH4/H2, Hl/H2, CH3l/H2 and Cl2/CH4/H2 at low pressure (1 mTorr) and low DC bias (-100 V) were characterized for InP etch rates, selectivity for etching the semiconductor over common masking material and changes to the electrical and structural properties of the etched surface. The Cl2/CH4/H2 chemistry provided the fastest etch rates but required sample temperatures of approximately=150 degrees C and dielectric masks. Microdisk lasers were fabricated to demonstrate the suitability of this plasma chemistry to photonic device processing." @default.
• W2071769689 created "2016-06-24" @default.
• W2071769689 creator A5032163821 @default.
• W2071769689 creator A5084440814 @default.
• W2071769689 creator A5085381025 @default.
• W2071769689 date "1994-02-01" @default.
• W2071769689 modified "2023-10-18" @default.
• W2071769689 title "Comparison of plasma chemistries for patterning InP-based laser structures" @default.
• W2071769689 cites W1220414608 @default.
• W2071769689 cites W1970028192 @default.
• W2071769689 cites W1988954699 @default.
• W2071769689 cites W1990023282 @default.
• W2071769689 cites W1996606143 @default.
• W2071769689 cites W1996746068 @default.
• W2071769689 cites W1998844435 @default.
• W2071769689 cites W2002306441 @default.
• W2071769689 cites W2006627882 @default.
• W2071769689 cites W2010754335 @default.
• W2071769689 cites W2011846262 @default.
• W2071769689 cites W2019896713 @default.
• W2071769689 cites W2028204484 @default.
• W2071769689 cites W2046777446 @default.
• W2071769689 cites W2049134033 @default.
• W2071769689 cites W2050980237 @default.
• W2071769689 cites W2067715337 @default.
• W2071769689 cites W2080486149 @default.
• W2071769689 cites W2087648184 @default.
• W2071769689 cites W2089183638 @default.
• W2071769689 cites W2089271243 @default.
• W2071769689 cites W2128561266 @default.
• W2071769689 cites W3146732660 @default.
• W2071769689 cites W4365787421 @default.
• W2071769689 doi "https://doi.org/10.1088/0963-0252/3/1/003" @default.
• W2071769689 hasPublicationYear "1994" @default.
• W2071769689 type Work @default.
• W2071769689 sameAs 2071769689 @default.
• W2071769689 citedByCount "5" @default.
• W2071769689 crossrefType "journal-article" @default.
• W2071769689 hasAuthorship W2071769689A5032163821 @default.
• W2071769689 hasAuthorship W2071769689A5084440814 @default.
• W2071769689 hasAuthorship W2071769689A5085381025 @default.
• W2071769689 hasConcept C100460472 @default.
• W2071769689 hasConcept C107187091 @default.
• W2071769689 hasConcept C108225325 @default.
• W2071769689 hasConcept C113196181 @default.
• W2071769689 hasConcept C120665830 @default.
• W2071769689 hasConcept C121332964 @default.
• W2071769689 hasConcept C1291036 @default.
• W2071769689 hasConcept C133386390 @default.
• W2071769689 hasConcept C136525101 @default.
• W2071769689 hasConcept C142362112 @default.
• W2071769689 hasConcept C142724271 @default.
• W2071769689 hasConcept C145148216 @default.
• W2071769689 hasConcept C153349607 @default.
• W2071769689 hasConcept C171250308 @default.
• W2071769689 hasConcept C175361016 @default.
• W2071769689 hasConcept C178790620 @default.
• W2071769689 hasConcept C185592680 @default.
• W2071769689 hasConcept C192562407 @default.
• W2071769689 hasConcept C204787440 @default.
• W2071769689 hasConcept C20788544 @default.
• W2071769689 hasConcept C2777402240 @default.
• W2071769689 hasConcept C2779227376 @default.
• W2071769689 hasConcept C43617362 @default.
• W2071769689 hasConcept C49040817 @default.
• W2071769689 hasConcept C520434653 @default.
• W2071769689 hasConcept C62520636 @default.
• W2071769689 hasConcept C6260449 @default.
• W2071769689 hasConcept C71924100 @default.
• W2071769689 hasConcept C82706917 @default.
• W2071769689 hasConceptScore W2071769689C100460472 @default.
• W2071769689 hasConceptScore W2071769689C107187091 @default.
• W2071769689 hasConceptScore W2071769689C108225325 @default.
• W2071769689 hasConceptScore W2071769689C113196181 @default.
• W2071769689 hasConceptScore W2071769689C120665830 @default.
• W2071769689 hasConceptScore W2071769689C121332964 @default.
• W2071769689 hasConceptScore W2071769689C1291036 @default.
• W2071769689 hasConceptScore W2071769689C133386390 @default.
• W2071769689 hasConceptScore W2071769689C136525101 @default.
• W2071769689 hasConceptScore W2071769689C142362112 @default.
• W2071769689 hasConceptScore W2071769689C142724271 @default.
• W2071769689 hasConceptScore W2071769689C145148216 @default.
• W2071769689 hasConceptScore W2071769689C153349607 @default.
• W2071769689 hasConceptScore W2071769689C171250308 @default.
• W2071769689 hasConceptScore W2071769689C175361016 @default.
• W2071769689 hasConceptScore W2071769689C178790620 @default.
• W2071769689 hasConceptScore W2071769689C185592680 @default.
• W2071769689 hasConceptScore W2071769689C192562407 @default.
• W2071769689 hasConceptScore W2071769689C204787440 @default.
• W2071769689 hasConceptScore W2071769689C20788544 @default.
• W2071769689 hasConceptScore W2071769689C2777402240 @default.
• W2071769689 hasConceptScore W2071769689C2779227376 @default.
• W2071769689 hasConceptScore W2071769689C43617362 @default.
• W2071769689 hasConceptScore W2071769689C49040817 @default.
• W2071769689 hasConceptScore W2071769689C520434653 @default.
• W2071769689 hasConceptScore W2071769689C62520636 @default.
• W2071769689 hasConceptScore W2071769689C6260449 @default.
• W2071769689 hasConceptScore W2071769689C71924100 @default.

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