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- W2071959372 abstract "Measurements of secondary electron emission (SEE) are presented for graphite, hydrogen-implanted graphite and an amorphous graphite (a-C:H) carbon layer, over a wide range of energies and angles of incidence. These data have been integrated over a Maxwellian velocity distribution to simulate the effect of SEE due to plasma electrons. The SEE yields have then been used to calculate plasma sheath potentials, sheath heat transmission coefficients and sputtering yields for a range of ions as a function of plasma temperature. The increased SEE yield with temperature reduces the normalized sheath potential and increases the sheath transmission coefficient markedly. The role of space charge in the sheath is discussed." @default.
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- W2071959372 title "Plasma sheath properties calculated using measured secondary electron emission coefficients" @default.
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- W2071959372 doi "https://doi.org/10.1088/0741-3335/35/3/009" @default.
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