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- W2071994966 abstract "Using ribs and bosses, a high-senstivity low non-linearity pressure sensor is demonstrated. The design method includes extensive use of finite-element simulation to optimize the geometries for both sensitivity and linearity. The structure uses a square cavity with a self-aligning rim to enhance manufacturability. The bosses are the same thickness as the rib, further enhancing manufacturability. The diaphragm is recessed. This maximizes the stress at the top surface of the rib, where the piezoresistors are placed." @default.
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- W2071994966 date "1992-12-01" @default.
- W2071994966 modified "2023-09-30" @default.
- W2071994966 title "A high-sensitivity ribbed and bossed pressure transducer" @default.
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- W2071994966 doi "https://doi.org/10.1016/0924-4247(92)80146-t" @default.
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