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- W2072046758 abstract "In the first part of the work the regularities of the envelope functions of the aplitude-phase spectra of the Fabry-Perot multiple-beam interference for acoustic wave are generalized. Basic physical principles extending the possibilities of the envelope function method for the determination of structure parameters are formulated." @default.
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- W2072046758 date "2014-06-01" @default.
- W2072046758 modified "2023-09-26" @default.
- W2072046758 title "Simulation of multibeam acoustic waves interference in plane-parallel coatings for MEMS" @default.
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- W2072046758 doi "https://doi.org/10.1109/mikon.2014.6899887" @default.
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