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• W2072154122 abstract "An ultrahigh etch rate (24μm∕min at 155°C and 0.3mm∕min at 325°C) of an organic film was successfully achieved using a microwave-excited nonequilibrium atmospheric-pressure plasma source employing He and O2 gases. This has the potential to be applied to various kinds of fabrication of structures for microelectromechanical systems and bionanotechnology. A stable glow discharge was realized between the narrow gap (200μm) electrodes covered with a dielectric film in atmospheric pressure. The etching characteristics were investigated by changing the O2 flow rate and the distance of the substrate from the electrode. In order to clarify the ultrahigh etching mechanism, in situ diagnostic methods, including two-dimensional imaging of optical emissions in the plasma with an intensified charge-coupled device camera, electron-density evaluation using the Stark-broadened profile of the hydrogen Balmer beta line in optical emission spectroscopy, and two dimensional spatial distribution of ozone density measured with ultraviolet absorption spectroscopy, have been performed. It was found that O atoms were the dominant etching species for ultrahigh-speed etching of the organic film, and the effect of ozone on the etching process was negligible." @default.
• W2072154122 created "2016-06-24" @default.
• W2072154122 creator A5006676797 @default.
• W2072154122 creator A5017229133 @default.
• W2072154122 creator A5055652136 @default.
• W2072154122 creator A5068017675 @default.
• W2072154122 creator A5071123019 @default.
• W2072154122 creator A5072242293 @default.
• W2072154122 date "2005-08-15" @default.
• W2072154122 modified "2023-10-18" @default.
• W2072154122 title "Ultrahigh-speed etching of organic films using microwave-excited nonequilibrium atmospheric-pressure plasma" @default.
• W2072154122 cites W1975193829 @default.
• W2072154122 cites W1982991814 @default.
• W2072154122 cites W1993791819 @default.
• W2072154122 cites W2007157210 @default.
• W2072154122 cites W2021626461 @default.
• W2072154122 cites W2061710839 @default.
• W2072154122 cites W2063742019 @default.
• W2072154122 cites W2064504085 @default.
• W2072154122 cites W2065132152 @default.
• W2072154122 cites W2067489882 @default.
• W2072154122 cites W2076296630 @default.
• W2072154122 cites W2076935774 @default.
• W2072154122 cites W2087986417 @default.
• W2072154122 doi "https://doi.org/10.1063/1.2030409" @default.
• W2072154122 hasPublicationYear "2005" @default.
• W2072154122 type Work @default.
• W2072154122 sameAs 2072154122 @default.
• W2072154122 citedByCount "21" @default.
• W2072154122 countsByYear W20721541222012 @default.
• W2072154122 countsByYear W20721541222013 @default.
• W2072154122 countsByYear W20721541222014 @default.
• W2072154122 countsByYear W20721541222016 @default.
• W2072154122 countsByYear W20721541222017 @default.
• W2072154122 countsByYear W20721541222020 @default.
• W2072154122 countsByYear W20721541222022 @default.
• W2072154122 crossrefType "journal-article" @default.
• W2072154122 hasAuthorship W2072154122A5006676797 @default.
• W2072154122 hasAuthorship W2072154122A5017229133 @default.
• W2072154122 hasAuthorship W2072154122A5055652136 @default.
• W2072154122 hasAuthorship W2072154122A5068017675 @default.
• W2072154122 hasAuthorship W2072154122A5071123019 @default.
• W2072154122 hasAuthorship W2072154122A5072242293 @default.
• W2072154122 hasConcept C100460472 @default.
• W2072154122 hasConcept C107187091 @default.
• W2072154122 hasConcept C111368507 @default.
• W2072154122 hasConcept C113196181 @default.
• W2072154122 hasConcept C120665830 @default.
• W2072154122 hasConcept C121332964 @default.
• W2072154122 hasConcept C127313418 @default.
• W2072154122 hasConcept C130472188 @default.
• W2072154122 hasConcept C171250308 @default.
• W2072154122 hasConcept C181500209 @default.
• W2072154122 hasConcept C184779094 @default.
• W2072154122 hasConcept C185592680 @default.
• W2072154122 hasConcept C192562407 @default.
• W2072154122 hasConcept C200239111 @default.
• W2072154122 hasConcept C2779227376 @default.
• W2072154122 hasConcept C40003534 @default.
• W2072154122 hasConcept C43617362 @default.
• W2072154122 hasConcept C44838205 @default.
• W2072154122 hasConcept C49040817 @default.
• W2072154122 hasConcept C62520636 @default.
• W2072154122 hasConcept C82706917 @default.
• W2072154122 hasConceptScore W2072154122C100460472 @default.
• W2072154122 hasConceptScore W2072154122C107187091 @default.
• W2072154122 hasConceptScore W2072154122C111368507 @default.
• W2072154122 hasConceptScore W2072154122C113196181 @default.
• W2072154122 hasConceptScore W2072154122C120665830 @default.
• W2072154122 hasConceptScore W2072154122C121332964 @default.
• W2072154122 hasConceptScore W2072154122C127313418 @default.
• W2072154122 hasConceptScore W2072154122C130472188 @default.
• W2072154122 hasConceptScore W2072154122C171250308 @default.
• W2072154122 hasConceptScore W2072154122C181500209 @default.
• W2072154122 hasConceptScore W2072154122C184779094 @default.
• W2072154122 hasConceptScore W2072154122C185592680 @default.
• W2072154122 hasConceptScore W2072154122C192562407 @default.
• W2072154122 hasConceptScore W2072154122C200239111 @default.
• W2072154122 hasConceptScore W2072154122C2779227376 @default.
• W2072154122 hasConceptScore W2072154122C40003534 @default.
• W2072154122 hasConceptScore W2072154122C43617362 @default.
• W2072154122 hasConceptScore W2072154122C44838205 @default.
• W2072154122 hasConceptScore W2072154122C49040817 @default.
• W2072154122 hasConceptScore W2072154122C62520636 @default.
• W2072154122 hasConceptScore W2072154122C82706917 @default.
• W2072154122 hasIssue "4" @default.
• W2072154122 hasLocation W20721541221 @default.
• W2072154122 hasOpenAccess W2072154122 @default.
• W2072154122 hasPrimaryLocation W20721541221 @default.
• W2072154122 hasRelatedWork W2017246694 @default.
• W2072154122 hasRelatedWork W2018162217 @default.
• W2072154122 hasRelatedWork W2022949630 @default.
• W2072154122 hasRelatedWork W2049342529 @default.
• W2072154122 hasRelatedWork W2052794911 @default.
• W2072154122 hasRelatedWork W2059112004 @default.
• W2072154122 hasRelatedWork W2139606557 @default.
• W2072154122 hasRelatedWork W2366161362 @default.
• W2072154122 hasRelatedWork W3197419717 @default.
• W2072154122 hasRelatedWork W4233578547 @default.
• W2072154122 hasVolume "98" @default.

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