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- W2072220036 abstract "Getting the most productivity per square foot of clean room space is a common goal for today's semiconductor fabs. Cluster tool throughput is an important factor in a tool's productivity index. Maximizing and accurately predicting throughput is a high priority in the cluster tool market. This paper presents a flexible and sufficiently accurate cluster tool simulation model. The simulation model can run as an emulator, using the real-world cluster tool scheduler (CTS), or as a stand-alone simulation model using a rule-based scheduler. The process of validating the stand-alone simulation rule-based scheduler against the actual cluster tool scheduler is discussed. A comparison between the two schedulers is detailed. Finally, the results, benefits, and limitations of the simulation model are presented." @default.
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- W2072220036 date "2000-12-10" @default.
- W2072220036 modified "2023-10-01" @default.
- W2072220036 title "Semiconductor process equipment modeling: using emulation to validate a cluster tool simulation model" @default.
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- W2072220036 doi "https://doi.org/10.5555/510378.510586" @default.
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