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- W2072362040 abstract "The development and application of a geometrically based uniformity criterion is presented for film uniformity control in a radial-flow epitaxy reactor system. In this multi-wafer reactor system, individual wafers rotate on a rotating susceptor in a planetary motion to reduce the effects of reactant depletion on deposition uniformity. The uniformity criterion developed for this system gives an unambiguous criterion for minimizing non-uniformity of any film property and gives physical insight into the reactor operating conditions that most influence uniformity. The uniformity criterion is used to demonstrate run-to-run uniformity control capabilities on a commercial system for SiC CVD." @default.
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- W2072362040 date "2007-06-01" @default.
- W2072362040 modified "2023-10-18" @default.
- W2072362040 title "Implementation of a geometrically based criterion for film uniformity control in a planetary SiC CVD reactor system" @default.
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- W2072362040 doi "https://doi.org/10.1016/j.jprocont.2006.04.004" @default.
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